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JEOL USA Press Releases

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Unique Mass Spectrometer for Analysis of Semiconductor Process Gases

June 15, 2017, Peabody, Mass. -- The JEOL InfiTOF compact high-resolution gas analysis mass spectrometer is ideal for monitoring trace impurities in semiconductor process gases, evolved gases from catalytic reactions, vapor epitaxy and more.  No larger than a desktop PC, the InfiTOF instantly separates isobaric gases such CO and N2, or N2O and CO2, for continuous monitoring without chromatography. 

This Time-of-Flight Mass Spectrometer uses Multi-turn and Perfect focusing technologies to achieve high mass-resolving power in a very compact package.

Designed for real time monitoring of directly introduced gas, this high mass-resolution mass spectrometer features stability for real time gas monitoring and elemental composition determination through accurate mass measurement. 

On July 11-13, the InfiTOF will be on display at Semicon West in San Francisco, CA, where its applications to the analysis of gases used in semiconductor processing and vapor epitaxy and real-time monitoring of gases relevant to catalytic processes, battery technology and advanced materials will be highlighted.



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JEOL USA, Inc.

JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.

JEOL USA, Inc., is a wholly owned subsidiary of JEOL, Ltd., Japan, was incorporated in the United States in 1962. The company has 13 regional service centers that offer unlimited emergency service and support in the U.S.

For more information about JEOL USA, Inc. or any JEOL products, visit www.jeolusa.com, or call 978-535-5900.