Recent JEOL Sales of E-Beam Tools Includes First-of-its-kind Installation in Pacific Northwest
January 6, 2009 (Peabody, Mass.) -- JEOL USA will install the first e-beam direct-write-on-wafer lithography tool to support nanoscience research in the Pacific Northwest when the University of Washington takes delivery of a JEOL JBX-6300FS e-beam system. The system will be installed in the state-funded Washington Technology Center Microfabrication Lab. Funding for the tool acquisition was provided through a state-supported STAR researchers’ grant to Michael Hochberg, Assistant Professor of Electrical Engineering, and a matching ...