JEOL Introduces New High Resolution Direct Write System
Peabody, Mass., May 19, 2006 -- JEOL, the leading manufacturer of e-beam lithography tools since 1967, announces the introduction of a new high precision direct write e-beam lithography system. The new JBX-6300FS is a spot beam, vector scan, step and repeat lithography system designed for high volume direct patterning on wafers, and is capable of writing minimum line widths of 8nm. 2-inch to 200mm wafers can be accommodated, as well as parts and pieces. ...