JEOL Unveils New High Throughput, Automated TEM for Nano-analysis
July 12, 2011 (Peabody, Mass.) -- A new 200kV Transmission Electron Microscope from JEOL delivers high throughput nano-analysis for process and quality control of mass produced semiconductor and materials samples. The multi-function JEOL JEM-2800 features high resolution imaging in TEM, STEM, and SE modes; ultrasensitive elemental mapping with a large angle Energy Dispersive Spectrometer (EDS); Electron Energy Loss Spectroscopy (EELS) for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples. The ...