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JSM-6510LV Series Scanning Electron Microscope

World’s most widely-used family of SEMs!

The JSM-6510 series SEMs are high-performance, low cost, scanning electron microscopes for fast characterization on a wide variety of sample types. Offered in both high vacuum and low vacuum models, this SEM is widely-used in all research fields and industrial applications.

Our Low Vacuum model provides the versatility of dealing with samples that are wet, oily, outgas excessively or are non-conductive without pretreatment.

Throughout the evolution of this popular SEM family, JEOL has continued to enhance features and capabilities to offer the best possible imaging resolution, versatility, and operator interface. The JSM-6510 series SEMs come ready for installation of additional analytical attachments such as energy dispersive X-ray spectrometer (EDS), electron backscatter diffraction (EBSD), and cathodoluminescence detectors (CL). The large chamber and mechanically eucentric stage offers full coverage of samples as large as 125mm in diameter.

JSM-6510LV Details
  • High resolution imaging with tungsten source (LaB6 Option)
  • Multi-element solid state BSE detector standard on LV models with high sensitivity at low kV or fast scan rates. (LV SE detector Option)
  • Large mechanically eucentric sample stage
  • Smart settings for common samples (create/store/recall)
  • Multiple Live Imaging (including Picture-in-Picture and signal mixing)
  • Video capture built in (AVI format)
  • Navigation from a color image (option)

 

Filament Pre-centered W hairpin filament (with continuous auto bias)
LaB6 option
Resolution High Vacuum mode: 3.0 nm (30kV), 8nm (3kV), 15nm (1kV)
Low Vacuum mode: 4.0 nm (30kV)
Accelerating voltage 500V to 30 kV
Magnification x5 to 300,000 (printed as a 128mm x 96mm micrograph)
LV Detector Multi-segment BSED (std.)
LV-SED (option)
LV Pressure 10 to 270 Pa
Maximum specimen size:
GS Type stage Observable:32mm diameter
Loadable:75mm
Height:50mm
LGS Type stage Observable:125mm diameter
Loadable:152mm
Height:50mm
Specimen stage**:
GS Type stage Eucentric goniometer
X=20mm, Y=10mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90° 
LGS Type stage Eucentric goniometer
X=80mm, Y=40mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90°
(Computer controlled 2, 3 or 5 axis motor drive: option)
Frame Store Up to 5120×3840 pixels
PC Desktop, Windows 7
** Stage size (GS or LGS) must be specified at time of purchase.

 

Application Notes

 
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