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  PRODUCTS : Electron Optics : Scanning Electron Microscopes (SEM) : Conventional FE : JSM-7001FTTLS HV/LV  
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JSM-7001FTTLS LV

The JSM-7001FTTLS LV combines JEOL’s proven "in-the-lens" field emission gun technology and electron optics with a unique Through-the-Lens System (TTLS). TTLS incorporates new objective lens and detector technology - plus low vacuum imaging - to create a highly versatile, ultrahigh resolution analytical FEG SEM.

Ultrahigh Resolution Imaging

This new FE SEM produces high resolution imaging results at ultra low kV. Observing the specimen surface at low voltage reduces beam penetration, specimen damage and charge buildup, allowing the user to see true surface details. The on-axis TTL detector, with in-column energy filter and beam deceleration (Gentle Beam Mode), improves resolution at low electron energies, allowing for observation of fine surface structures at very low voltages and very high magnification.

High Spatial Resolution Microanalysis

Designed for versatility, this analytical SEM achieves high spatial resolution microanalysis using EDS, WDS, EBSD, and CL. The integrated and automated aperture angle control lens (ACL) provides optimum probe size and optimum convergence angle for a wide range of applications. An optional retractable solid-state or PMT STEM detector allows imaging of thin, electron-transparent samples with sub 0.8nm resolution, and allows simultaneous imaging and EDS analysis.

Low Vacuum Operation

The flexibility of this SEM is displayed in its ability to run in low vacuum (LV) mode for imaging nonconductive samples at high kV and beam currents for a variety of analytical applications. The system includes in vacuo removal of both differential pumping apertures for uncompromised imaging at all beam currents.

In Lens Detectors-TTLS

The JSM-7001FTTLS LV has a new objective lens with the TTL detectors with an energy filter operational with the Gentle Beam to enhance ultra low voltage performance. An additional benefit of the new TTL system is the ability to image and analyze highly magnetic samples. The TTLS operates at low magnification (10X) with no distortion of the image or the EBSD pattern, allowing collection of large area EBSD maps of large grain materials.

JSM-7001FTTLS LV Key Product Features
Resolution
(secondary electron image)
1.0 nm (at 30 kV)
1.2 nm (at 30 kV)
2.0 nm (at 1.0 kV, with GB)
3.0 nm, 15 kV, 5 nA, WD 10 mm
Accelerating Voltage 0.1 to 30 kV
Magnification 10X – 1,000,000X
Imaging Modes SEI (secondary electron image)
BSE
STEM
Specimen Stage

Mechanically eucentric at all WDs (all 5 axes automated)

Type I
X=70mm, Y=50mm, Z=38mm (WD 3 to 41mm)
T=-5 to 70° R=360°

Type II
X=110mm, Y=80mm, Z=38mm (WD 3 to 41mm)
T=-5 to 60° R=360°

Type III
X=140mm, Y=80mm

Objective Lens Magnetic field free lens includes aperture angle control lens for pole size optimization
Beam Deceleration Up to 2 kV specimen bias
Low Vacuum Operation Includes BSE detector and in vacuo removable differential pumping orifices
Probe Current Range 1 pA to 200nA
Standard Detectors ET-type secondary electron detector
Through-the-lens detector (with filtering grid)
Optional
Detectors
 
Retractable solid-state BSE detector
Upper secondary detector
In-column Faraday cup (PCD)
Retractable solid state or PMT-type STEM
EDS, WDS, EBSD, STEM, CL, PCD, etc. EDS and EBSD mounted at 90o to the tilt of the specimen stage
Speciment Exchange Chamber Stable, ultra-clean vacuum. One-action exchange mechanism.
Image Selector SEI, COMPO, TOPO, EDS, ADD, Auxiliary Input
Image Database Image archiving, searching, % area fraction, custom report generation, montaging, image filtering, annotation, brightness & contrast adjustment. Optional modules include 3D stereo, metrology, particle analysis.
Auto Functions AFD (Auto Focus)
ACB (Auto Contrast and Brightness Control)
ASD (Auto Stigmator)
AFD ACB

 
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