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  PRODUCTS : Electron Optics : Scanning Electron Microscopes (SEM) : FE SEM : JSM-7100F  
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JSM-7100F Analytical Field Emission SEM

The JSM-7100F is a highly versatile, easy-to-use analytical field emission SEM that offers a new level of expanded performance to the budget-conscious lab. This high resolution SEM is ideal for both imaging and analysis of nanostructures, and determining chemical composition of the sample through X-ray spectroscopy. By combining large beam currents with a small probe size at ANY accelerating voltage, the JEOL JSM-7100F dramatically increases analytical resolution to the sub 100nm scale.

Versatile Performance

For the lab using multiple analytical techniques or requiring special capabilities, the JSM-7100F is available with low vacuum operation (JSM-7100F LV) for non-conductive samples and for enhanced high resolution imaging of nanostructures, specimen surface details and magnetic samples (JSM-7100FT).

The JSM-7100F is equipped with a large specimen chamber that accommodates a wide variety of detectors simultaneously, including: multiple EDS, WDS, STEM, BSE, and IR camera. The system can also be equipped with a variety of sub stages including tensile, heating and cooling stages for in situ experimentation.

JSM-7100F Details
  • The thermally-assisted Schottky gun maintains long-term beam stability for analysis as well as high beam current, high resolution, and low kV high resolution imaging. A battery backup system for the FEG gun is standard.
  • Through the unique ‘in-lens field emission gun’, the SEM delivers ≥ 200 nA of beam current to the sample. 
  • An aperture angle control lens (ACL) automatically optimizes both small probe current spot size for high resolution imaging and spot shape for high beam current, high resolution microanalysis.
  • A beam deceleration mode curtails charging on nonconductive specimens such as ceramics, semiconductors and polymers. 
  • The objective lens forms no magnetic field around the sample, so magnetic samples can be analyzed without restriction.
  • The system comes standard with a turbo molecular pump (TMP) and a rapid specimen exchange airlock to assure a clean vacuum environment is always maintained. 
  • The Graphical User Interface can display up to four live images simultaneously and allows live signal mixing of up to four different signals. 
  • MS Windows 7® software in the host computer enables the user to set the SEM observation conditions, control the specimen-stage motor-drive, observe images and file data. 
  • Every stored image retains its specific set of operating conditions and stage coordinates, making it an ideal choice in the multi-user environment. 
  • For enhanced productivity, all image archiving, searching, measurement, report generation, filtering, and montaging can be conducted from the image database.
SEI Resolution 1.2nm at 30kV
1.5nm at 15kV
3.0nm at 1.0kV
3.0nm (15kV, 5nA, 10mm WD)
Accelerating Voltage 0.5 to 2.9kV (in 10V steps)
(0.2 to 2.9kV in GBL mode)
2.9 to 30kV (in 100V steps)
Magnification Range
 10X to 1,000,000X

 

LV capability supports operation at low chamber vacuum (from 10 to 300 Pa) for the purpose of imaging and microanalysis of non-conductive samples. The LV configuration includes a retractable solid state backscattered electron detector. Via software control, both backscatter detector and all LV orifices can be retracted without breaking chamber vacuum. This is a JEOL exclusive feature that guarantees unrestricted low magnification imaging and the ability to deliver maximum beam currents in HV operation. The system comes with an automatic pressure controller with motorized leak valve and uses dry nitrogen.

Low vacuum mode pressure 10 Pa ~ 300 Pa
Resolution in Low Vacuum mode
Backscattered electron image 3 nm (30 Pa, 30 kV)
Secondary electron image 3 nm (60 Pa, 30 kV)
Maximum probe current
In high vacuum mode 200 nA
In low vacuum mode 20 nA
Orifice and BSE detector
LV BEI standard, LV SED option		 Retractable in vacuum

The JSM-7100FT incorporates all features of the JSM-7100F, with several key performance enhancements.

The JSM-7100FT employs a newly designed hybrid conical objective lens that is a combination of electromagnetic and electrostatic lenses and through-the-lens electron detectors with energy filter allowing the selection of topography, Z contrast or a mix of the two. With no electromagnetic leakage below the lens, it is ideal for imaging magnetic samples and analyzing samples with EBSD. With the integration of in-the-lens acceleration and deceleration of the electron beam, low kV aberrations are reduced, yielding higher resolution at the lowest accelerating voltages.

JEOL's proven beam deceleration mode (GB Mode) decreases charging on nonconductive specimens, improves spot size at low kV, and enhances surface topography.

Specifications

SEI Resolution 1.2nm at 30kV
2.0nm at 1.0kV in GB mode
2.5nm at 1.0kV w/o GB
3.0nm (15kV, 5nA, 10mm WD)
Accelerating Voltage 0.01 to 30kV
Beam Current Range 3pA to 200nA
Magnification Range
 10X to 1,000,000X (in HV mode)

 

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