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InfiTOF Multi-Turn Time-of-Flight Mass Spectrometer

High resolution at low mass allows the InfiTOF to separate species such as H2+/D+ and He+/D2+

The InfiTOF mass resolving power is >30,000 - more than enough to separate closely-spaced species in gas samples.


The new compact InfiTOF mass spectrometer is designed for real-time, direct gas introduction and analysis. With its high mass resolving power, this system can be used to determine elemental compositions for ions within the range of m/z 1 - 1,000. The hydrogen ion H+ can be detected with this powerful, multi-turn and multi-segment breakthrough in technology that makes it possible to obtain high resolution with a small ion flight path design. The InfiTOF is the latest addition to JEOL's time-of-flight mass spectrometer product line. 

Ideal for Semiconductor Process Gases

The InfiTOF is ideal for monitoring trace impurities in semiconductor process gases, evolved gases from catalytic reactions, vapor epitaxy and more.  InfiTOF instantly separates isobaric gases such CO and N2, or N2O and CO2, for continuous monitoring without chromatography.