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WM-10 Wafer Surface Inspector

WM-10A low cost of operation and minimal investment tool for wafer surface defect detection, the WM-10 features sensitivity of 48nm on bare Si, auto sensitivity correction, improved X/Y coordinate reporting, and a wide dynamic range.

This state-of-the-art tool uses a Violet LD 408nm wavelength light source to differentiate between pits and particles, and accommodates wafer sizes from 100mm to 300mm.

Features:

  • One or Two-Axis, Violet Laser Diode Light Source
  • Wide dynamic range
  • Accommodates wafer sizes: 100-300mm
  • Fast throughput
  • Auto sensitivity correction: gives stable results; easy-to-use; very reliable
JEOL USA is pleased to represent Topcon semiconductor equipment with North American sales and award-winning service support.