JEOL produces high precision instruments designed to prepare samples prior to imaging with the SEM or TEM. From Focused Ion Beam (FIB) systems for nanometric specimens, to a benchtop cross section polisher for large area samples, we offer a selection of specialized instruments to quickly prepare precise cross sections of semiconductor devices, metals, ceramics, and multi-layer structures.
For coating of non-conductive samples and forming carbon and various metal-deposited films, we offer an extremely clean vacuum evaporator. These and other peripheral equipment compliment JEOL’s comprehensive line of electron microscopes.
Cross Section Polisher: Easy-to-use, sample preparation device for SEM, EPMA, and SAM applications
Ion Slicer: Innovative specimen preparation for TEM, STEM, SEM, EPMA, AUGER
Vacuum Evaporator: Clean, oil-free, automatic evacuation system for carbon coating of samples
JEM-9320FIB: Gallium (Ga) liquid metal Focused Ion Beam system
JIB-4500: MultiBeam, a new high performance SEM and micro milling FIB
Smart Coater: Simple-to-use sputter coater with fully automated vacuum and sputtering