JEOL USA blog

High Speed Milling for Rapid Cross-Section Polishing

Fri, 05 Jun 2026 11:21:58 GMT

A Deep Dive into JEOL SEM Microscopes—Which is Right for You?

Fri, 29 May 2026 18:39:00 GMT

Overcoming Key Challenges in DRAM Transistor Formation Using E-Beams

Fri, 06 Mar 2026 14:00:09 GMT

An Introduction to FIB-SEM

Tue, 24 Feb 2026 13:29:22 GMT

Using High-Resolution SEM and TEM for Advanced Semiconductor Packaging

Mon, 23 Feb 2026 09:54:17 GMT

How is Metrology Used in Failure Analysis?

Wed, 18 Feb 2026 15:17:49 GMT

What is a FinFET and How Does it Work?

Thu, 12 Feb 2026 00:46:00 GMT

What is a FinFET and How Does it Work?

For decades, the planar MOSFET was the bedrock of integrated circuits. But as semiconductor nodes shrank, the physical limits of this 2D design began to show. Engineers faced a critical challenge: "short-channel effects." As the distance between the source and drain decreased, the gate lost electrostatic control, leading to current leakage and increased power consumption.

The industry needed a new transistor geometry. The solution was to go 3D.

Enter the FinFET. This multi-gate transistor architecture revolutionized semiconductor design by enabling the development of advanced nodes. Instead of a planar channel, the FinFET uses a vertical silicon "fin" that rises from the substrate. The gate is wrapped around this fin on three sides, providing superior electrostatic control and mitigating the short-channel effects that plagued its planar predecessors.

This "multi-gate" approach is a key concept. A multi-gate device, as the name implies, has more than one gate on a single transistor. This family of devices includes not only FinFETs but also future architectures like Gate-All-Around (GAA) FETs, which promise even greater control and scaling.

A Quick Primer: Planar vs. FinFET

To understand the difference, imagine a simple cross-section:

Planar MOSFET: A flat, 2D channel lies on the silicon substrate. The gate sits on top, controlling the flow of current.
FinFET: A 3D fin of silicon rises vertically. The gate wraps around the fin, creating a larger, more effective control area.

Key terms to know for FinFETs include:

Fin Height (Hfin): The height of the silicon fin.
Fin Width (Wfin): The thickness of the fin.
Pitch: The distance between adjacent fins.
Gate Length: The length of the gate as it wraps around the fin.

How a FinFET Actually Operates

The genius of the FinFET lies in its 3D gate control. By wrapping the gate around the fin, the FinFET achieves:

Superior Depletion: The gate can more effectively deplete the channel of charge carriers, leading to a much lower "off-state" leakage current.
Steeper Subthreshold Slope: The subthreshold slope is a measure of how quickly a transistor can switch from "off" to "on." A steeper slope means a more efficient switch, and FinFETs excel in this regard. This translates to lower power consumption.
Increased Drive Current: At the same supply voltage (Vdd), a FinFET can deliver a higher drive current than a planar device. This means faster, more powerful processors.
Parasitics to Watch: The 3D structure also introduces new parasitic capacitances and resistances that must be carefully managed during design and characterization.

Boxed Math: The Fin Aspect Ratio

The electrostatic control of a FinFET is directly related to its fin aspect ratio (Hfin/Wfin). A taller, thinner fin (a higher aspect ratio) provides better gate control and reduces short-channel effects. However, it also presents significant manufacturing and characterization challenges.

Complementary FET (CFET) architectures represent the next step beyond FINFET-based scaling. In a CFET, the n-type and p-type transistors that form a completely metal-oxide semiconductor (CMOS) pair are vertically stacked rather than placed side by side. This vertical arrangement significantly reduces standard cell area without relying on further lateral pitch scaling. CFETs build directly on the gate-control concepts established by “Gate-All-Around” devices, but shift the primary scaling benefit toward stacking and layout efficiency, making them a leading candidate for technology nodes below 2 nm.

Why 3D Geometry Demands New Characterization

The complex, three-dimensional nature of FinFETs presents new challenges for process control and failure analysis. Simply put, you can't characterize what you can't see. Key challenges include:

Targeting Specific Fins: In dense arrays of fins, isolating a single, specific fin for analysis is a major hurdle.
Preserving Interfaces: The interfaces between the high-k dielectric and the metal gate (HKMG) stack are critical to device performance. Preparing a sample for analysis without damaging these delicate layers is essential.

This is where JEOL's purpose-built workflows come in.

The JEOL Workflow: From Specimen to Atomic-Scale Analysis

JEOL provides an end-to-end solution for FinFET characterization, from specimen preparation to atomic-scale imaging and analysis.

Site-Specific Preparation:
- FIB-SEM: Our Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) systems allow for precise, site-specific milling to isolate the fin of interest.
- Cross Section Polisher™ (CP): For wide, clean, and damage-free cross sections, our CP tools use a broad argon ion beam to gently polish the sample surface. For sensitive materials, our air-isolation options protect the sample from atmospheric contamination.
High-Resolution Imaging and Analysis:
- JSM-IT800/IT810 FE-SEM: These Field Emission SEMs provide ultra-high-resolution imaging for critical dimension (CD) measurements, line-edge roughness analysis, and defect localization. Integrated Energy Dispersive X-ray Spectroscopy (EDS) provides elemental composition information.
Atomic-Scale Structure and Chemistry:
- JEM-ARM300F (GRAND ARM): This aberration-corrected STEM (Scanning Transmission Electron Microscope) achieves resolutions of 58-63 pm, allowing for the direct imaging of atomic structures. With integrated EDS and Electron Energy Loss Spectroscopy (EELS), you can perform detailed chemical analysis of the gate stack and interfaces.
3D Device Tomography:
- JEOL's STEM/EDS tomography capabilities enable the 3D reconstruction of fins and contacts, providing a complete picture of the device's structure.

Application Example: Creating a TEM Specimen of a FinFET

A typical JEOL workflow for creating a TEM specimen of a FinFET might look like this:

SEM Targeting: Use a JEOL SEM to locate the specific fin or feature of interest.
CP or FIB Preparation: Use our Cross Section Polisher™ for a wide, damage-free cross-section, or a FIB-SEM for site-specific milling and lift-out.
Lift-Out and Mounting: The prepared lamella is carefully lifted out and attached to a grid mounted on a double-tilted TEM holder.
HR-STEM Imaging and EELS: The specimen is then transferred to a JEM-ARM300F for high-resolution STEM imaging and EELS mapping of the gate oxide and work-function metals.

Common Pitfalls and How JEOL Mitigates Them

Curtaining and Mechanical Damage: Traditional cross-sectioning methods can introduce artifacts like "curtaining" (vertical lines on the cross-section) and mechanical damage. JEOL's Cross Section Polisher™ (CP) minimizes these effects.
Beam Damage and Contamination: Sensitive materials can be damaged by the electron beam or contaminated by exposure to air. JEOL's air-isolation transfer systems and advanced beam control technologies protect your sample throughout the workflow.

The Takeaway

The performance and reliability of FinFET devices are inseparable from their atomic-scale structure and chemistry. JEOL's comprehensive, end-to-end workflow—from specimen preparation to imaging and analysis—provides the critical insights needed to shorten development cycles and accelerate process learning.

Discuss a FinFET specimen-to-analysis workflow on your device—schedule a session with JEOL applications.

Which Techniques are Used in Lithium-Ion Battery Analysis?

Fri, 13 Sep 2024 07:47:04 GMT

Which Techniques are Used in Lithium-Ion Battery Analysis?

In modern technology, lithium-ion batteries (LIB) are found in many different applications, including electric cars and portable electronic devices, such as tablets and smartphones. Other purposes include aerospace and defense industries, energy storage systems, and medical devices. Lithium-ion batteries are now considered essential for many technological applications, making their analysis vital for manufacturing, enhancement, and applications. This blog post will focus on the techniques used to analyze lithium-ion batteries.

Why Do We Analyze Lithium Ion Batteries?

Lithium-ion batteries consist of many different components, layers, and structures that are essential for their high-performance properties. These comprise of fluids, powders, sheets, and other materials. The importance of analyzing LIBs lies in understanding their quality and reliability, which impacts their uses in various industries. Analyzing lithium-ion batteries is necessary to understand how they age, what internal changes occur, and what properties are present.

Lithium Ion Batteries Analysis Techniques

There is a growing demand for high-performance, durable lithium-ion batteries, especially now that their applications span multiple industries. Due to technological and scientific advances, several methods can be used to analyze lithium-ion batteries and their components. Below, we provide a brief overview of some key methods:

Scanning Electron Microscopy (SEM): SEM is a widely used method for studying the fine surface and internal structures and chemical properties of battery materials. It is also helpful for monitoring reactions and performance in next-generation batteries. Moreover, when coupled with a Windowless Energy Dispersive X-ray detector (EDS), this instrument is capable of observing lithium.
Transmission Electron Microscopy (TEM): This method helps scientists monitor the microstructural characteristics of lithium-ion batteries, including electrodes and materials, and study chemistry between battery components.
Auger Microprobe (EMAS): Used to detect lithium, analyze a sample's surface and internal regions, and conduct depth profiling of positive and negative electrode materials, key components in lithium batteries. EMAS is also used to analyze chemical processes, irregularities, and surface structures of LIBs.
X-ray Fluorescence Spectroscopy (XRF): XRF enables the analysis of types and concentrations of elements in a sample, which includes the powder used in lithium-ion batteries. This method is used to identify contaminants and the structural composition of LIBs.

JEOL USA: Lithium Ion Batteries

JEOL USA offers the instruments discussed above and more for the analysis of lithium-ion batteries. By using these tools, engineers and researchers can assess the performance and safety levels of these systems, leading to the manufacture of higher-quality products.

JEOL solutions are ideal for analyzing the performance and quality of LIBs, from manufacturing and failure analysis to research and development. The product ranges include spectrometers, microanalyzers, electron microscopes, and other scientific systems.

Contact a member of JEOL today to learn more about the tools and techniques used in lithium-ion battery analysis.

How to Decipher an SEM-EDS Spectrum

Thu, 08 Aug 2024 16:03:40 GMT

How to Decipher an SEM-EDS Spectrum

Investigating the chemical composition of materials is important for fully understanding their material properties. Often, chemical heterogeneity at the micro- to nanoscale influences the macroscopic behavior of materials. For these types of samples, SEM-EDS is ideal.

Scanning Electron Microscopy (SEM) can be used in tandem with Energy Dispersive X-ray Spectroscopy (EDS) to better understand material properties. At its core, SEM uses a high-energy electron beam to characterize samples at the micro- to nanoscale, offering higher resolution and depth of field than other microscopy techniques. Secondary and backscattered electrons generated by interactions between the electron beam and sample can be used to characterize surface morphology and composition respectively. Similarly, characteristic X-rays generated by the sample can be analyzed to assess its composition.

Characteristic X-rays are emitted when outer orbital electrons within an atom relax to fill lower-energy vacancies within inner orbitals created by a high-energy source such as an electron beam. Both the energy and wavelength of these X-rays are unique to the element they are generated from. While multiple techniques exist to analyze these X-rays, perhaps the most common to pair with SEM is EDS. At their core, EDS detectors analyze the chemical composition of materials by counting the X-rays being generated and measuring each X-ray’s energy to determine what element it came from.

EDS detectors are prized for their speed, versatility and ease of use. They allow users to quickly assess what elements are present in a sample and estimate the relative abundances, often in near-real time and without destroying the sample. We often visualize EDS data as a spectrum, showing X-ray energy vs. number of X-rays analyzed (intensity). Interpreting this spectrum and how it is transposed into chemical compositions is critical for accurately characterizing materials.

Although technologic advancements such as automatic element identification, peak deconvolution and quantification have vastly simplified interpreting EDS data, it is still important to understand the principles and best practices of SEM-EDS. This basic understanding empowers users to feel confident about their SEM-EDS results and consistently collect the best chemical data possible.

Read on to learn more detail about how to interpret and utilize an SEM-EDS spectrum.

1. Identifying the Elements Present

When irradiated by a high-energy source such as an electron beam, every element emits a set of X-rays with unique energies and wavelengths, hence, “characteristic X-rays”. Modern state-of-the-art SEM-EDS detectors can analyze X-rays ranging in energy from tens of electron volts (eV) to tens of kiloelectron volts (keV), allowing users to characterize nearly every element between Li and U. Most standard EDS systems are optimized for analyzing Be or B through U.

As shown in Figure 1 below, we visualize EDS data as a spectrum, plotting X-ray energy versus intensity. The peak intensity corresponds to the element’s relative abundance in the sample, while the width of each peak corresponds to the energy resolution of the EDS detector, typically 125-132 eV (FWHM at Mn-Kα).

Modern SEM-EDS software is designed to automatically identify X-ray peaks by comparing their shape and energy to a known database. This allows users of all skill levels to readily collect EDS data. However, for minor or trace (~0.1-5 wt%) elements, the software may be unable to distinguish the peak from the background radiation (Bremsstrahlung). In this case, users may need to manually examine the spectrum to confirm the element's presence. Similarly, some X-ray peaks overlap within the uncertainty of the method, requiring software peak deconvolution. While this method is robust for even severe peak overlaps (e.g., Ti-Ba or W-Si), users should be aware of what peak overlaps to expect for their sample to ensure they are adequately accounted for.

2. Quantitative Analysis

SEM-EDS is used both for providing qualitative information about the elements present and as a semi-quantitative analysis technique. To accurately quantify elemental concentrations, considerations such as the homogeneity, thickness, and surface topography of the sample are essential. These factors influence the accuracy of the quantitative results.

While there are multiple approaches for calculating the sample composition from an EDS spectrum, the simplest and most widely utilized is standardless quantitative analysis. This method compares the relative intensities of all of the identified peaks, normalizing the results to 100%. A matrix correction (e.g., ZAF, Φρz) is applied to account for variations in X-ray yield efficiency as a function of composition. For an ideal sample, this method is reproducible within ±2% to ±5% for major components.

Alternatively, some users may choose to calculate quantitative results using standards. In this case, the peak intensity of each element present in the sample is compared to that of a standard. A matrix correction is still applied. While this approach in principle yields more accurate quantitative results, it relies more heavily on ideal sample preparation and is far more susceptible to user error.

3. Sample Preparation

The quality of SEM-EDS analysis is highly dependent on sample preparation. The sample should be polished, flat, and homogeneous relative to the interaction volume of the electron beam to ensure accurate chemical analysis. For samples with non-uniform composition, acquiring spectra from multiple areas or acquiring a hyperspectral EDS map can help assess heterogeneity.The quality of SEM-EDS analysis is highly dependent on sample preparation. The sample should be polished, flat, and homogeneous relative to the interaction volume of the electron beam to ensure accurate chemical analysis. For samples with non-uniform composition, acquiring spectra from multiple areas or acquiring a hyperspectral EDS map can help assess heterogeneity.

4. Consideration of Topography

The topography of a sample can significantly affect SEM-EDS analysis. Rough or irregular surfaces may preferentially absorb or block X-rays, leading to errors in calculated composition. Positioning the sample to provide a direct line of sight between the region of interest is crucial and can assist in fully characterizing the sample, though quantitative results should be treated with caution.

5. Accelerating Voltage

The choice of accelerating voltage is critical for the excitation of X-ray lines of elements in the sample. A voltage 1.5 to 2 times higher than the energy of the X-ray lines from the element(s) of interest is recommended to efficiently excite the element. For unknown samples, using an accelerating voltage between 15 kV and 20 kV ensures that all elements present are identified. However, users might choose to collect EDS data at lower accelerating voltages to minimize interaction volume, especially to aid in characterization of small nano- to micro-scale features.

6. Hyperspectral EDS Mapping

Modern EDS systems offer advanced features like acquiring hyperspectral EDS maps, enabling the detailed characterization of chemically heterogeneous samples. Rather than acquiring an EDS spectrum at a single point, hyperspectral maps are more akin to SEM images, where every pixel in the image represents an individual EDS spectrum. This technique is powerful for understanding the distribution of elements in a sample, allowing identification and full characterization of discrete layers, phases or chemical gradients. The ability to treat each pixel as a quantitative analysis by leveraging quantitative mapping (QMap) allows samples even with complex matrices to be studied. This makes the technique invaluable for studying samples with:

● Complex compositions

● Overlapping peaks

● Minor/trace elements with low peak/background ratios

Final Thoughts on the SEM-EDS Spectrum

With a basic understanding of the principles of SEM-EDS, researchers and analysts can effectively acquire and interpret robust EDS data. This can unlock valuable quantitative and qualitative insights into their samples.

It is crucial to consider the limitations and challenges associated with SEM-EDS analysis, including sample preparation and the potential for quantitative errors. However, with a careful approach and interpretation, SEM-EDS remains an indispensable tool in materials science and engineering for elemental analysis at the micro- to nano scale.

JEOL USA’s Tools Incorporate the SEM-EDS Spectrum

SEM-EDS analyses are fast, effective, and can help interrogate a wide range of material properties and characteristics. Understanding what EDS spectra are and how they can be used to inform qualitative and semi-quantitative chemical analysis of samples is essential for accurately interpreting and gaining the most out of this type of analysis.

SEM-EDS can provide powerful information about the material properties at the micro- to nanoscale. It is therefore utilized for with a variety of materials such as:

● Polymers

● Metals

● Ceramics

● Composites

● Batteries

● Pharmaceuticals

● Rocks and minerals

● Forensics

● Electronics and semiconductors

Chemical analysis of these materials by SEM-EDS can be leveraged across industry, government and academic sectors for wide range of applications spanning from investigating the chemical composition of minerals in meteorites to fingerprinting forensic samples to developing next-generation energy storage solutions and beyond.

If you are looking for an innovative SEM-EDS tool or analytical technique to help you with your research, we, JEOL USA, would recommend browsing our website.

Ready to learn more about our Gather-X Windowless EDS? This state-of-the-art detector can help you characterize ultra-low energy characteristic X-rays that are under 1 keV, including Li-Kα. When paired with our ultrahigh resolution field emission SEM product line, this ground-breaking technique is transforming the types of materials that we can observe and study.

For more information on SEM-EDS analysis or the SEM-EDS spectrum, we invite you to browse through our website. Check out our blog page to learn more about elemental analysis with electron microscopes, a guide on energy dispersive spectroscopy and so much more!

Our technology can help you ensure that your materials have the right characteristics for their future applications. Contact us today to find the best SEM-EDS tool for you.

The Evolution of SEM-EDS Systems: From Basic Detectors to Advanced Analytical Tools

Sun, 21 Jul 2024 18:14:00 GMT

The Evolution of SEM-EDS Systems: From Basic Detectors to Advanced Analytical Tools

Scanning Electron Microscopy (SEM) is often paired with energy dispersive spectroscopy (EDS) to examine a variety of materials, from batteries and ceramics to semiconductors, metals, and more. SEM-EDS can be used to investigate both the micro- to nanostructure of these materials in tandem with their composition, providing critical insights into both research and development and manufacturing processes.

An Overview of SEM-EDS Systems

SEMs are commonly equipped with an EDS detector to enable investigators to pair ultrahigh resolution imaging with non-destructive chemical analysis. The basics of these two highly complementary techniques are as follows:

SEM: An imaging technique that uses a high-energy electron beam to characterize materials with up to sub-nano-scale resolution. Secondary and backscattered electrons, generated as a result of the interaction between the electron beam and a sample, provide information about the sample’s surface morphology, structure, and composition.
EDS: Measures X-rays produced by a sample as a result of electron beam irradiation. The energy of each X-ray is characteristic of the element it is generated from. This allows EDS to be used to assess the composition of samples and estimate the abundance of each element present. EDS is a non-destructive technique and, when paired with SEM, can be used to analyze samples with 10-100 μm analytical resolution.

The History of SEM-EDS Systems

SEM was invented in the 1930s and reached the commercial market in the 1960s. First developed as a stand-alone imaging technique, SEM revolutionized the way that scientists could view and characterize materials. Electron microscopy technology advanced rapidly over the next decade, including the seminal integration of EDS with electron microscopy in 1968. In the decades to follow, EDS became commercially available for integration with SEM, greatly extending SEM’s capabilities to enable both high-resolution imaging and paired chemical analysis.

Advancements in SEM-EDS Systems

Like other technologies, SEM-EDS has advanced orders of magnitude in the past several decades. Analog scan generators became digital, field emitter sources improved resolution, detectors are faster and more sensitive, and software makes these systems approachable for even novice users.

Of the numerous achievements in SEM-EDS technology, some of the greatest innovations include:

Better resolution: Continuous advancements in electron optics technology have significantly improved the resolution and sensitivity of SEM. In particular, field emission (FE) SEM has emerged as the flagship solution for ultrahigh resolution imaging. With sub-nm resolution, FE-SEM permits unprecedented observation of insulating and beam sensitive materials as well as outstanding imaging resolution for characterizing nanoscale features.
Improved EDS technology: Like electron optics, EDS technology has advanced exponentially over the last several decades. The development of silicon drift detectors (SDD) greatly improved the sensitivity of EDS, permitting faster analyses even at lower accelerating voltages and probe currents.Similarly, the replacement of beryllium windows with thinner polymer windows or, even more recently, windowless designs have allowed for improved sensitivity, especially for low-energy X-rays. This has enabled the detection of elements as light as beryllium (with a polymer window) or even lithium (with a windowless design). The sensitivity of modern EDS detectors, in particular windowless detectors, has significantly improved analytical resolution to allow for EDS analyses and the mapping of 10s nm-scale features.
Variable Pressure: The ability to introduce air or an inert gas into a SEM chamber to reduce charge build-up on insulating samples has allowed for the examination of a wider range of materials. While insulating materials like polymers or biologic specimens previously needed to be coated with a thin layer of a conductive material (such as gold or platinum) for SEM-EDS, the fast transition to low vacuum/variable pressure mode on modern SEMs now allows for the full characterization of these materials in their natural state.
Ease of use: Modern SEM-EDS systems are equipped with sophisticated software that enhances image processing, data analysis, and interpretation. Machine learning algorithms and automated analysis tools have streamlined the workflow, reducing manual effort and increasing accuracy. This software also allows for more complex data visualizations and interpretations, making it easier to extract meaningful insights.
Integration with other techniques: Other recent innovations include the direct integration of SEM-EDS with other analytical techniques, such as focused ion beam (FIB), X-ray fluorescence (XRF), or Raman spectroscopy. These hybrid systems are the ultimate analytical workstations, providing a comprehensive understanding of materials and their properties on a single platform.

Our Contribution to EDS Systems: The Gather-X Windowless EDS

If you are interested in an EDS device, JEOL would like to recommend our own state-of-the-art EDS system: The Gather-X Windowless EDS. This detector can identify characteristic X-rays that are <1 keV, permitting the direct observation of elements as light as lithium. Gather-X offers best-in-class sensitivity, allowing for EDS analysis at lower accelerating voltages and probe currents. This enables unmatched EDS spatial resolution for the analysis and mapping of nm-scale features. Visit our website to learn more about the Gather-X Windowless EDS.

Explore the Capabilities of SEM-EDS Systems

SEM-EDS systems have come a long way since their inception, evolving into powerful tools that offer unparalleled imaging and analytical capabilities. The integration of high-resolution imaging with precise elemental analysis has transformed research and industry, providing critical insights into micro and nanoscale worlds. As technology continues to advance, SEM-EDS systems will undoubtedly play an even more pivotal role in scientific discovery and technological innovation.

Uncover more about SEM-EDS systems on our website. There, we have a variety of resources about SEM-EDS. These range from articles on its application in material analysis to how it can be used for elemental mapping. You can also browse our SEM technologies to see if any devices catch your attention.

How to Carry Out Particle Analysis with Benchtop SEM

Mon, 01 Apr 2024 20:13:33 GMT

How to Carry Out Particle Analysis with Benchtop SEM

Micro and nanosized particles are found in many types of materials, including food additives, metals, polymers and catalysts. In an effort to formulate novel industrial, medical and scientific applications, researchers seek to characterize the mechanical, thermal and chemical properties of these particles.

A benchtop scanning electron microscope (or tabletop SEM) is used in industry and academia to characterize particles’ morphological, topographical, and chemical characteristics. They allow a precise determination of these characteristics while rendering stunning images of specimens.

Sample Preparation for a Benchtop SEM

Electron microscopy, including transmission electron microscopy (TEM) and scanning electron microscopy (SEM), is recognized as the gold standard for the characterization of particles at nanoscales (orders of 10-9 meters). Electron microscopes are versatile tools providing greater depths of field than optical microscopes, higher resolutions and a capacity to reveal chemical compositions when combined with a range of spectroscopy techniques.

Sample preparation is an essential part of an efficient workflow when using a benchtop SEM. The sample must typically be dried. For non-conductive materials, the sample may be coated with a nanometer-thick layer of conductive carbon or metal (such as gold) to prevent spurious charging while studying the sample. Once the sample has been prepared, it is placed in the analysis chamber of the benchtop SEM. Typically, analysis is performed in a vacuum, and users may employ cryogenic methods for the preparation of sensitive materials.

During operation of the benchtop SEM, a high-energy beam of electrons is scanned across the sample. Coaxial magnets focus the electron beam to a point as small as several nanometers in diameter. As the electron beam interacts with the sample’s surface, the signals generated are collected by various imaging and analytical detectors. Thus, high-resolution nanoscale images are formed and precise measurements are obtained.

Particle diameters and geometries may be studied in great detail. By utilizing several images together with software, the size distribution of particles may be determined and a concentration versus particle diameter may also be calculated. A tabletop SEM enables flexible approaches to the analysis of various types of particulates in semiconductors, powders for additive manufacturing, automotive cleanliness and polymers.

Particle Analysis Using a Benchtop SEM

The analysis of particle size is essential to the characterization of materials. This includes the identification of foreign substances, forensic examinations and quality control in additive manufacturing, automotive/aerospace cleanliness and pharmaceuticals.

In order to elucidate questions surrounding morphology, surface area and porosity, researchers have traditionally turned to light scattering, light obscuration or direct imaging techniques. While characterizing the size distribution of particles is essential, correlating this information with chemical composition offers valuable insights into the characteristics of materials. The combination of a benchtop SEM with energy-dispersive X-ray spectroscopy (EDS) is the ideal solution for integrating particle visualization and chemical composition analysis.

JEOL’s Particle Analysis Software 3 (PA3) has been integrated into its Benchtop SEM/EDS platform. It enhances the capabilities of a benchtop SEM by automating the detection, chemical analysis and classification of particles, grains and other features found in materials. As part of an efficient workflow, it provides fast, unattended measurements across sizeable areas of a sample or even multiple samples.

A typical workflow involves taking an optical image with an integrated Stage Navigation System camera. This image is used to quickly navigate regions of interest, simplifying the acquisition of benchtop SEM images and EDS spectra within an automated workflow. User-defined recipes may be utilized for specific use cases. These recipes streamline the setup, allowing less experienced users to execute a run. The software is also preloaded with materials-specific libraries such as the Metal Feature Analysis (MFA) Library, which complies with ISO 4967.

JEOL’s PA3 software has advanced functionalities for particle characterization, including probe tracking, using shape information to include or exclude particles from EDS analyses and different methods of stopping the run (by count, morphology or element). PA3 facilitates the identification and analysis significantly increasing the throughput of benchtop SEM/EDS-based characterization.

Learn more:

Benchtop SEM from JEOL

The benchtop SEM (and EDS) system from JEOL allows users to set up a compact and user-friendly lab environment without compromising data integrity. This efficient workflow guides the user from sample preparation to imaging, particle analysis and reporting.

How Benchtop SEM can Benefit Energy Storage Applications

Mon, 01 Apr 2024 20:12:03 GMT

How Benchtop SEM can Benefit Energy Storage Applications

The quest for renewable energy sources is prompting the development of technologies capable of tapping into alternative energy sources such as solar, wind, geothermal and tidal energy. To fully exploit these energy sources, engineers need novel ways of storing and converting these energies.

Lithium-ion batteries are generally the power source of choice for the booming market in portable electronic devices, including smartphones, smartwatches and laptops. These batteries are complex energy storage devices with unique electrochemical characteristics incorporating high-density metals, low-density polymers and other materials.

The benchtop scanning electron microscope (benchtop SEM) is a key analytical tool in investigating materials' mechanical, chemical and electrical properties in batteries, fuel cells, supercapacitors, electrolyzers and heterogeneous catalysts.

Characterization of Energy Storage Devices Using a Benchtop SEM

In electrochemical systems, the critical properties affecting the quality of energy conversion processes are determined by component surfaces and their microscopic properties. The microscopic properties affecting the bulk behaviors of these components are of particular interest to materials scientists.

Anode

The efficiency of batteries and fuel cells is governed by the diffusion of ions, the transport of electrons and the chemical interactions of electrode/electrolyte materials. Using a benchtop SEM, engineers can characterize the structure and properties of components that shed light on their behavior during electrochemical processes. These behaviors may include ion relocation, lattice expansion or contraction, phase transition and surface reconstruction.

In batteries, the charging and discharging processes involve the transfer of ions through an electrolyte and the interfaces between an electrode and an electrolyte. Improving the performance of batteries requires the design of electrode materials with adequate energy density and efficiently designed electrode and electrolyte configurations.

Supercapacitors store and release energy through the accumulation and dissipation of charges at solid-liquid interfaces. To improve their performance, engineers need to design efficient interfacial structures that increase charge density (capacity) and enhance the transfer of cations and anions (power density).

Cathode

Fuel cells convert chemical energy into electrical energy by oxidizing fuels such as hydrogen and alcohols. To enhance the kinetics of catalysts, engineers need to optimize their surface composition and structure.

For heterogeneous thermal catalysts, engineers seek to control the molecular structures of catalysts and enhance support-catalyst interactions.

These varied applications present unique challenges to materials scientists. Nonetheless, they all depend on efficient transfers and interaction of particles within materials or their interfaces at nanometer scales. The benchtop SEM is an indispensable tool in the characterization of these processes. Using a benchtop SEM, materials scientists can obtain high-resolution images and perform elemental analysis of materials at nanoscales. A benchtop SEM enables:

Surface imaging of an electrode
Imaging cross-sections of electrodes or battery cells
Grain structure and orientation analysis on surfaces
Determination of grain boundary losses
Defect analysis
Elemental analysis of surfaces
Chemical phase analysis

EDS map overlay

Use Cases of a Benchtop SEM in Energy Storage Applications

Batteries and fuel cells - Lithium-ion batteries are used in portable electronic devices, stationary power sources and electric vehicles. Their performance is determined by energy density, battery capacity, charge and discharge rates and the lifetime of the battery. A benchtop SEM enables the identification of defects and the characterization of nanostructures in lithium-ion batteries.

Cathode analysis - Cathodes undergo electrochemical stresses during lithiation and delithiation. This may lead to grain cracking, changes in pore sizes and contact loss of particles, thus reducing the lifetime of the battery. A benchtop SEM may perform particle orientation and structure analysis to track these defects.

Anode analysis - Similarly to cathodes, anodes undergo electrochemical stresses. However, since they are typically made of graphite, their failure characteristics may be different. A benchtop SEM may help characterize defects in graphite particles that lead to defective ionic transfers, which reduce the lifetime of the battery.

Photovoltaic solar cells - Photovoltaic solar cells are typically manufactured from crystalline silicon. The bulk behavior of these silicons is determined by their crystallinity and crystal sizes. To improve solar cell technology, materials scientists require a detailed understanding of the nanostructures, compositions and electrical properties of these silicons. Again, a benchtop SEM may help characterize these properties.

These are a few examples of the applications facilitated by a benchtop SEM. Materials engineers may find other applications for their benchtop SEM that fulfill specific use case scenarios.

Benchtop SEM from JEOL

The JCM-7000 benchtop SEM from JEOL incorporates advanced functionalities that make it simple for users at any skill level to obtain outstanding images and elemental analysis results in just minutes. It is equipped with real-time 3D imaging, advanced auto functions and the option to add a fully embedded EDS system for real-time compositional analysis.

Particle Analysis

Electron Microscopy Excels at Elemental Analysis

Mon, 01 Apr 2024 20:11:27 GMT

Electron microscopes make it possible to see extraordinary details at ultrahigh magnifications, but they also make it possible to determine more details about the material you are investigating. Scanning Electron Microscopes (SEM) and Transmission Electron Microscopes (TEM) are essentially nanolabs when outfitted with multiple analytical detectors. For example, energy dispersive X-ray detectors (EDS or EDX) are used extensively to provide insight for analysis of elements ranging from Be to U. More specialized detectors enable detection of light elements like Li, or, in the case of TEM, fast elemental mapping up to atomic resolution.

Analytical SEM for EDS and SXES

EDS in general is considered a semi-quantitative elemental analysis technique. SEM-EDS provides information on the elements present, their relative concentrations and spatial distribution over very small volumes (micron and some instances nanometer scale).

With the analytical SEM you can view an EDS spectrum in real-time while also searching for the area of interest on the sample. JEOL EDS software makes it possible to perform Live Analysis, high resolution spectral mapping and quantitative mapping, drift compensation, line scan, and to produce large area montage maps. The fully-integrated EDS detector is capable of detecting elements from Be to U.

Gather-X, a new Windowless EDS from JEOL, provides even higher sensitivity and low-energy X-Ray detection, and can collect the entire X-ray range produced from the ultrahigh resolution Field Emission SEM, including low-energy X-rays down to Lithium. Collection provides clear, high count rate EDS maps with high spatial resolution.

For efficient and parallel collection of very low energy-rays a Soft X-ray Emission Spectrometer (SXES) provides the ultimate high spectral resolution (0.3eV). Ideal for Lithium Ion Battery research, it allows for the Nitrogen Kα and Titanium Lℓ line to be resolved with a separation of only 1.78eV, and also ultra-low energy, low-concentration sensitivity with the capability to detect Li even at low single digit weight percent concentration. An additional, and maybe its strongest asset, is its ability to do chemical state analysis. The spectrometer can detect subtle differences in emitted X-rays from conduction band and valence band which allows the distinction between bonding and crystal structure in samples containing the same elements.

TEM Analytical Capability at the Atomic Level

For Transmission Electron Microscopy, JEOL SDD detectors ranging from 60mm ² to 158mm ² deliver unparalleled EDX analytical results for a wide range of materials. Utilizing JEOL’s unique, on-the-fly “Lossless Drift Compensation”, large pixel EDX maps can be generated at up to atomic resolution, even for beam sensitive or 2D materials, at various accelerating voltages. In addition, JEOL’s spectrum imaging saves not only the entire spectrum data set but also each individual spectral slice, allowing for the specific summing of any number of frames collected during an experiment, which is useful for in-situ experiments.

Designing Better Batteries through Innovative Microscopy Characterization and Analysis

Mon, 01 Apr 2024 20:04:02 GMT

The drive is on to improve the performance of Lithium-ion batteries, particularly to increase energy density, life cycle, and safety. However, during development and assessment of their performance, lithium-ion batteries can present unique challenges for characterization and analysis using electron microscopy.

The basic structure of Lithium-ion batteries (LIB) contains as many as 10 different thin films and at least that many solid−solid interfaces. These interfaces consist of thin layers of cathode material, insulating barriers, anode materials, metal current collectors, and the electrolyte. These various components are in the form of powders, sheets, and fluids and require assessment before and after assembly and after repeated charge/discharge operations. Researchers who are correlating electrochemical behavior to what is physically happening within the cell need to study the 3D microstructure of the battery components as well as the interfaces formed between those layers.

The efficiency of batteries and fuel cells is governed by the diffusion of ions, the transport of electrons and the chemical interactions of electrode/electrolyte materials. Engineers can routinely characterize the structure and properties of components that shed light on their behavior during electrochemical processes, including ion relocation, lattice expansion or contraction, phase transition and surface reconstruction.

However, since materials containing Li are reactive in ambient environments, being able to prepare, image, and analyze samples without exposing them to the atmosphere becomes vitally important. For that purpose, JEOL has established an air-isolated workflow from sample preparation using ion beam milling, to characterization and elemental analysis in the Scanning Electron Microscope (SEM) or Transmission Electron Microscope (TEM), without exposing the specimen to the atmosphere. JEOL ultrahigh resolution Field Emission SEMs, equipped with our new Gather-X Windowless EDS, detect ultra-low energy elements such as lithium (with Li K line of 54 eV) . Analyzing lithium and other light elements requires low kV imaging and analysis and often high beam current achievable in JEOL’s multipurpose or analytical high resolution SEMs.

Learn more about JEOL's air-isolated workflow, pristine sample preparation of sensitive samples, and high resolution imaging and analysis solutions at https://go.jeolusa.com/EM-LIB.

Visualizing Elements Distributions with SEM-EDS Mapping

Mon, 01 Apr 2024 19:05:11 GMT

Visualizing Elemental Distributions with SEM-EDS Mapping

Elemental distributions can tell us a lot about the formation of different materials. By understanding the distribution and abundance of the elements found in a material at the microscopic scale, we can better understand its material properties. Essentially, elemental analysis is the key to predicting a material’s macroscopic behavior.

Pairing Scanning Electron Microscopy (SEM) and Energy Dispersive X-ray Spectroscopy (EDS) can produce maps showing the distribution of the different elements that are present within a material with sub-micrometer resolution. SEM-EDS mapping is fast, high-resolution, non-destructive and can readily be integrated with SEM images and other microanalysis techniques to fully characterize samples.

Read on to learn more about SEM-EDS mapping and elemental distributions!

The Principles of SEM-EDS Mapping

At its core, SEM-EDS mapping utilizes an electron beam to excite and analyze X-rays characteristic of the sample composition. By analyzing the composition at every pixel within an image to create EDS maps, variations in composition can be easily visualized. Recent advancements in EDS detector design and efficiency mean that this method is fast, yielding real-time data in seconds. Integration with complementary SEM imaging detectors provides unmatched insights into how composition relates to morphology and structure, allowing for comprehensive characterization.

Advancements in SEM-EDS Technology: Automated Solutions

The advent of advanced AI-powered autofocusing and alignment routines allows users to leverage automated solutions that improve workflow efficiency and reduce the expertise needed to collect SEM-EDS data. Software-integrated automated imaging and EDS mapping solutions such as Simple SEM allow users the flexibility to create and implement custom automation routines within an intuitive user interface. For more advanced applications like automated particle analysis, users can develop custom automation routines in Python or opt for user-friendly solutions like Particle Analysis Software 3 (PA3). PA3 in particular offers rapid particle identification and classification, enabling high through-put analysis of millions of particles. These solutions streamline research and development across various fields, increasing productivity without sacrificing data quality.

Impact of SEM-EDS Across Industries

The application of SEM-EDS mapping is vast and varied, including but not limited to:

Automotive manufacturing: Assess component cleanliness, identify contamination that may lead to component failure.
Additive manufacturing: Optimize materials for better product quality.
Pharmaceutics: Ensure the uniformity of drug formulations and identify contaminants.
Forensics: Identification and examination of trace evidence and gunshot residue.
Electronics: Characterize device structure, identify contaminants and defects.
Battery: Characterize battery materials, ensure clean battery manufacturing.

Navigating the Complexities of SEM-EDS Mapping

The successful application of SEM-EDS mapping requires a thorough understanding of both its capabilities and limitations. Software solutions including automatic peak identification and deconvolution as well as intuitive data reporting have greatly helped simplify EDS map processing. Utilizing cluster or vertex component analyses using Phase Analysis 2 software enables more advanced processing, including automatic identification and characterization of discrete chemical phases within a sample. However, with all of these solutions proper sample preparation and skilled data interpretation are still essential to fully leverage the technology and derive accurate, meaningful insights. With JEOL’s advanced application training courses, we ensure that every user is empowered to get the most out of their SEM, regardless of prior experience.

The Future of SEM-EDS Mapping

As technology continues to advance, the capabilities of SEM-EDS mapping are expected to expand further. This will not only broaden its application range but also deepen our understanding of material properties, reinforcing its indispensable role in the progression of various scientific and industrial sectors.

SEM-EDS mapping is undeniably a cornerstone technique in modern material science. This method offers a comprehensive view of material structures at the micro and nano levels. Its ongoing development is pivotal for fostering innovation.

Learn more about Elemental Distributions Through SEM-EDS Mapping

SEM-EDS mapping is an extremely reliable method of identifying the distributions of elements in different materials. With its versatility comes the ability to apply it to different areas. For instance, SEM-EDS mapping can be used to ensure battery devices are defect-free and then immediately be used to improve the lifespan of an electric vehicle battery.

To maintain the quality of SEM-EDS mapping, we must keep thinking of ways to improve its capabilities. Right now, there have already been some developments in SEM-EDS mapping. This includes the incorporation of AI-related technologies, like machine learning, and introduction of windowless EDS detectors to expand their sensitivity and detection capabilities.

Now that you understand SEM-EDS mapping, it is time to find a tool that can be applied to your own research. If you are interested in EDS mapping in particular, we, JEOL, would like to recommend our own EDS detector: Gather-X Windowless EDS.

The Gather-X Windowless EDS can be utilized for identifying characteristic x-rays. It has been designed to improve the amount of time it takes to receive data and can also decrease the harm that could be done to a beam sensitive material. Its sensitivity at low accelerating voltages and efficiency analyzing ultralow energy X-rays including lithium (Kα) make it uniquely suited for a range of applications including ultrahigh resolution EDS mapping and characterization of Li-ion battery materials.

To learn more about our Gather-X Windowless EDS, please feel free to contact us at any time. Moreover, you can explore our recent articles to learn about SEM-EDS mapping or related topics. To offer a few examples, we provide more detail about:

● Automated particle analysis using SEM-EDS

● Particle analysis through benchtop SEM

● Different types of scanning electron microscopes for laboratories.

Browse our blogs to expand your knowledge on SEM-EDS mapping. Then you can move onto finding the right SEM-EDS mapping tool that can be used in your own work.

Why Use SEM-EDS for Advanced Materials Analysis?

Sun, 21 Jan 2024 13:11:37 GMT

Pharmaceutical Imaging and Analysis: Advantages of Benchtop Scanning Electron Microscopy vs. Optical Microscopy

Sun, 21 Jan 2024 12:38:39 GMT

Focus on MXenes, Materials, and Scanning Electron Microscopy

Mon, 18 Dec 2023 00:45:49 GMT

An SEM User’s Guide to Energy Dispersive Spectroscopy

Sat, 02 Dec 2023 20:27:50 GMT

STEM Students from Massachusetts Heading to M&M 2023

Wed, 16 Aug 2023 18:11:07 GMT

A group of hard-working middle and high school students in northeast Massachusetts have conducted research during this school year that has earned them a spot at the prestigious Microscopy & Microanalysis (M&M) annual conference. Four of the young authors of two papers are headed to the major conference to be held in Minneapolis this July. There they will present their work in an interdisciplinary (cross-cutting) symposium, focusing on “expanding engagement to build a bigger, better future for the M&M community.”

This is the fourth year that local teachers’ guidance has brought them into the world of professional research and to M&M.

Encouraged, inspired, and lead by science and engineering teachers Saman Abbas and Doug Shattuck, the students who attend St. Joseph’s School and Malden Catholic High School are engaged in the outreach program of Professor Marcus Buhler, head of the Massachusetts Institute of Technology (MIT) Laboratory for Atomistic and Molecular Mechanics. Students also have access to the impressive lab resources at Malden Catholic. Additionally, they tap into the microscopy resources and expertise at JEOL USA in Peabody, Mass. JEOL’s Vern Robertson provides high magnification SEM images and X-ray microanalysis as well as lively talks during STEM fairs and conference presentations.

This year, the two research projects the students decided to pursue are 1) exploring lunar resources for human habitation on the moon, and 2) analyzing the natural radiation resistance of a microorganism called Tardigrades that could be applied to sunscreen.

Potential lunar resources for construction contain basalt, which happens to be used in building materials on earth. They are light but strong. “Basalt fibers are spun through a die and look like cotton candy, or human hair” says Mr. Shattuck. As for its stability “You can do magic with it. Kits are sold to patch concrete, and it is much stronger than steel rebar which is typically used in Portland cement.” Multiple tests on the fibers included the use of electron microscope data and EDS analyses provided by Mr. Robertson.

As for the sunscreen research, students looked to Tardigrades, invertebrate microscopic animals that are difficult to see with the human eye. They are found in mosses and lichens, soils and sand covered in water. Tardigrades have a special ability to resist radiation. Shattuck said that fact led students to the question, “How could the Damage Suppressor Protein (DSUP) that naturally shields Tardigrades become an active ingredient in a protective sunscreen for humans?” In their research, students applied the protein to clear plastic beads and exposed them to UV light. The application shows promise for preventing exposure to radiation from sunlight.

With research ranging from Martian and lunar regolith for extraterrestrial building materials, to spider webs for tensile strength (a research project a few years ago), and Tardigrade proteins for sunscreen, Shattuck and Robertson have certainly enjoyed learning along with the STEM students. “This is a real-world opportunity for students to conduct research,” said Robertson. JEOL is pleased to be part of this work and we hope to share some of the students’ work in our booth #706 at M&M 2023.

JEOL USA blog

High Speed Milling for Rapid Cross-Section Polishing

A Deep Dive into JEOL SEM Microscopes—Which is Right for You?

Overcoming Key Challenges in DRAM Transistor Formation Using E-Beams

An Introduction to FIB-SEM

Using High-Resolution SEM and TEM for Advanced Semiconductor Packaging

How is Metrology Used in Failure Analysis?

What is a FinFET and How Does it Work?

What is a FinFET and How Does it Work?

A Quick Primer: Planar vs. FinFET

How a FinFET Actually Operates

Boxed Math: The Fin Aspect Ratio

Why 3D Geometry Demands New Characterization

The JEOL Workflow: From Specimen to Atomic-Scale Analysis

Application Example: Creating a TEM Specimen of a FinFET

Common Pitfalls and How JEOL Mitigates Them

The Takeaway

Which Techniques are Used in Lithium-Ion Battery Analysis?

Which Techniques are Used in Lithium-Ion Battery Analysis?

Why Do We Analyze Lithium Ion Batteries?

Lithium Ion Batteries Analysis Techniques

JEOL USA: Lithium Ion Batteries

How to Decipher an SEM-EDS Spectrum

How to Decipher an SEM-EDS Spectrum

1. Identifying the Elements Present

2. Quantitative Analysis

3. Sample Preparation

4. Consideration of Topography

5. Accelerating Voltage

6. Hyperspectral EDS Mapping

Final Thoughts on the SEM-EDS Spectrum

JEOL USA’s Tools Incorporate the SEM-EDS Spectrum

The Evolution of SEM-EDS Systems: From Basic Detectors to Advanced Analytical Tools

The Evolution of SEM-EDS Systems: From Basic Detectors to Advanced Analytical Tools

An Overview of SEM-EDS Systems

The History of SEM-EDS Systems

Advancements in SEM-EDS Systems

Our Contribution to EDS Systems: The Gather-X Windowless EDS

Explore the Capabilities of SEM-EDS Systems

How to Carry Out Particle Analysis with Benchtop SEM

How to Carry Out Particle Analysis with Benchtop SEM

Sample Preparation for a Benchtop SEM

Particle Analysis Using a Benchtop SEM

Learn more:

Benchtop SEM from JEOL

How Benchtop SEM can Benefit Energy Storage Applications

How Benchtop SEM can Benefit Energy Storage Applications

Characterization of Energy Storage Devices Using a Benchtop SEM

Use Cases of a Benchtop SEM in Energy Storage Applications

Benchtop SEM from JEOL

Electron Microscopy Excels at Elemental Analysis

Analytical SEM for EDS and SXES

TEM Analytical Capability at the Atomic Level

Designing Better Batteries through Innovative Microscopy Characterization and Analysis

Visualizing Elements Distributions with SEM-EDS Mapping

Visualizing Elemental Distributions with SEM-EDS Mapping

The Principles of SEM-EDS Mapping

Advancements in SEM-EDS Technology: Automated Solutions

Impact of SEM-EDS Across Industries

Navigating the Complexities of SEM-EDS Mapping

The Future of SEM-EDS Mapping

Learn more about Elemental Distributions Through SEM-EDS Mapping

Why Use SEM-EDS for Advanced Materials Analysis?

Pharmaceutical Imaging and Analysis: Advantages of Benchtop Scanning Electron Microscopy vs. Optical Microscopy

Focus on MXenes, Materials, and Scanning Electron Microscopy

An SEM User’s Guide to Energy Dispersive Spectroscopy

STEM Students from Massachusetts Heading to M&M 2023

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