JEOL Resources

Automated Imaging Solutions for SEM

Wed, 03 Jan 2024 16:50:43 GMT

Automation of routine imaging in Scanning Electron Microscopy (SEM) has gained significant popularity over recent years. Automation provides users with additional levels of flexibility, including unattended and remote operation, as well as repeatability of their measurements. This ability maximizes productivity and sample throughput and significantly lowers the level of expertise required to proficiently operate SEMs. JEOL now offers both simple and advanced automation solutions, giving users the capability to develop protocols that fit their exact imaging needs. When paired with best-in- class AI-driven auto-function technology (auto focus, auto astigmatism correction, auto brightness/contrast), JEOL’s automation solutions are fast, reliable, reproducible, and applicable to a wide range of applications.

Simple Automation with Simple SEM

Simple SEM, JEOL’s latest advancement in automated imaging solutions, is a fully-integrated interface for creating and implementing imaging routines (Figure 1) without the need for programing experience. Users have the ability to develop custom automated workflows, including acquisition of SEM images and EDS data at a series of magnifications and locations on the sample surface and with varying operating conditions (accelerating voltage, probe current). Simply checking a box enables JEOL’s best-in-class auto-functions, with the added flexibility to control how often these functions are utilized within the workflow. Once routines are created, they are automatically saved and can be quickly implemented by simply selecting the area(s) on the sample that the user wants to characterize directly from a live image or ZeroMag view.

Simple SEM is available as part of the standard software package on JEOL’s JSM-IT210, JSM-IT510 and JSM-IT710 SEM models.

Figure 1. Simple SEM is fully integrated within JEOL’s SEM control software, creating an intuitive environment for users to develop automation workflows without any need for programing experience.

Compatible Instruments: JSM-IT210, JSM-IT510, JSM-IT710HR
Options: integration with JEOL EDS

Advanced Automation with Python and C#

For customers with more unique or challenging imaging demands, JEOL continues offers advanced external SEM control using Python or C# (Figure 2). This gives users the flexibility to fully develop and customize imaging protocols and interfaces, optimize acquisition at any operating conditions, automate image processing, and even integrate machine learning (Figure 3).

Figure 2. JEOL offers full external microscope control using Python and C#, allowing users to develop custom interfaces and automation programs. A full library of functions is available upon request.

Figure 3. External control allows users to develop custom interfaces and programs and integrate complex automation routines.

External control with Python (3.5.1 or later) and C# available with all current JEOL SEM models. Additional compatible SEM models are available upon request.

Choose the Right SEM − Analysis Edition

Wed, 23 Jun 2021 13:12:28 GMT

The holy grail of nanoscale analysis with EDS is to quickly analyze any features which can be imaged in the SEM. However, for nanoscale features this is complicated by that fact that X-ray spatial resolution is typically larger than SEM imaging resolution. Figure 1 shows EDS maps from an integrated circuit cross section at 15kV and 6kV using a W SEM and an FE SEM, as well as the approximate X-ray signal depths at those voltages.

Figure 1: EDS maps (same count rate/total time) from IC cross section at 15kV and 6kV using a W SEM and an FE SEM.

The W SEM is suitable for analysis of larger structures (hundreds of nm). Lowering kV allows for a smaller X-ray signal depth within the sample and thus higher X-ray spatial resolution (see the O and Al maps). If ultra-high X-ray spatial resolution is needed to resolve ~50nm layers (see the Ti maps), then an FE SEM is the best option, since FE emitters maintain a very small spot size even at low kV. Table 1 shows a comparison of some relevant parameters between thermionic tungsten emitters and Schottky field emission emitters.

Parameters	Thermionic Tungsten	Schottky Field Emission
Brightness (A cm^-2sr^-1	10⁵	10⁷-10⁸
Energy spread (eV)	1-3	0.5-0.6
Life time	~100 h	~3 years or longer

Table 1: A comparison of parameters between thermionic tungsten and Schottky field emission emitters.

Large Direct Access Chamber SEMs

Thu, 27 May 2021 12:42:26 GMT

JEOL’s large chamber SEMs are designed for easy access in both the Tungsten SEM and Thermal Schottky Field Emission SEM models. Our large, direct-access sample chambers are ideal suited for the labs that require:

High-throughput and multi-sample imaging and analysis
Multiple ports to fit a variety of accessories
Analysis of large samples that cannot be cut to size

JEOL’s large chamber includes multiple ports and smart analytical port geometry, providing ample space for several accessories. It can accommodate multiple EDS detectors, co-planar EDS and EBSD, CL, Roland Circle or Parallel Beam WDS, STEM, feedthroughs for micro manipulators, EBIC, cold or heating stages, micro-CT and other accessories.

JEOL Large Chamber SEMs offer straightforward workflow solutions – from easy access to fast and effortless analysis and observation. The typical amount of time from specimen introduction to SEM observation can be as fast as 2.5 minutes or less. JEOL’s mechanically eucentric stage allows the user to maintain the specimen position and respectful field of view no matter what the working distance or tilt.

The stage is mounted inside the chamber, providing a robust platform to place large and heavy objects. There is no confusion on sample position. The area of interest can be positioned under the objective lens prior to closing the door and evacuating the chamber. Furthermore, all five axes of motor control are at your disposal.

Advantages of JEOL Large Chamber SEMs:

Direct Access Stage for easy sample placement
Tall, large and heavy samples can be examined. Taller samples can be offset from the side of stage
Maintain all 5 axes motor control even with heavy samples
No fragile stage modules or spacers to remove to accommodate bulky specimens
Multi sample holders to accommodate 10s of samples for high throughput

Large Analytical Chamber SEM - Will my samples fit?

Large Analytical Chamber SEM - Rotation and Tilt

Observation of wet specimens sensitive to evaporation using scanning electron microscopy (Microscopy magazine)

Sun, 13 Feb 2022 17:31:22 GMT

Wet specimens are notoriously difficult to image in scanning electron microscopes (SEM) owing to evaporation from the required vacuum of the specimen chamber. Traditionally, this issue has been addressed by increasing the specimen chamber pressure. Unfortunately, observation under high specimen chamber pressure cannot prevent the initial evaporation effects. The wet cover method, where the original surface water is retained (and, therefore, considered wet), provides a way to introduce and subsequently image specimens that are sensitive to evaporation within a SEM, while preventing evaporation-related damage, and to observe interesting specimen–water interactions.

As seen in Microscopy, 2018, 356–366

Phase Analysis 2

Mon, 02 Jan 2023 10:13:32 GMT

Phase Analysis (EX-36430PHA2)

JEOL’s Phase Analysis software creates Cluster (single color) and VCA (gradient color) phase maps for each chemical composition from EDS map data. A multivariate analysis of the EDS Map data is used to automatically identify the phases for the Cluster phase. A vertex component analysis creates phase maps with color gradation.

A composite map, individual phase maps, fractional area (Cluster phase only), spectra, and quantitative results are immediately displayed and can be sent to PowerPoint®, Word®, or pdf.

Cluster Phase

Gradient Phase (VCA)

By analyzing alloys, minerals, batteries, etc., the distribution of the compounds can be displayed in an easy-to-understand manner.

Advanced functions are built-in for optimizing the number of phases. These functions include:

Live preview allowing the analyst to review changes before implementation
Enhanced edge detection
Trace element phase identification

Phase maps can be processed and viewed in multiple ways (Word, PowerPoint, PDF) for reports adaptable to meet your requirements.

SEM - 3D Surface Reconstruction

Thu, 17 Jun 2021 11:47:14 GMT

SEM is an indispensable tool for studying the microstructure of a wide variety of materials. The images generated are inherently a 2 dimensional representation of the sample surface. Unlocking the 3rd dimension by reconstructing a 3D model from multiple SEM images can enhance our understanding of complex microstructure. This 3D view is often more intuitive and surface metrology characteristics can be calculated.

The table below highlights two common software options for 3D Surface Reconstruction in SEM offered by JEOL.

	3D Sight P/N: MP-45030TDI	Smile View™ Map P/N: DS-JE-SVM
Constructs 3D model from	2 Images	1, 2 or 4 Images
3D Color Intensity Maps	✓	✓
Anaglyph Image	✓	✓
Height Profile and measurement	✓	✓
Image Calibration		✓
Image Enhancement & Correction		✓
Geometric Analysis		✓
Surface Texture Analysis		✓
Colorization		✓
Colocalization (Correlation)		✓
Optional Modules: Particle Analysis Advanced Topography Advanced Profile Fourier and Wavelets		✓

Simple phase analysis with EDS

Thu, 06 Nov 2025 12:02:04 GMT

Automatic one-click creation of chemical compound maps

EDS mapping is a way to visualize elemental distribution across a specimen. Phase Analysis is an extension of EDS map analysis for visualization of the chemical distribution. With one click, Phase Analysis automatically creates equivalent chemical composition area (phase map) as well as phase spectra and quantitative analysis.