Model |
Output
ANGLE |
Deflection |
Scanning |
Crucible
(mL) |
Applications** |
BS-60050EBS |
10kW |
270° |
High speed |
Option |
A/B/C/D |
BS-60040VDGN |
10kW |
270° |
High speed |
Option |
A/B/C/D |
BS-60030DGN |
10kW |
270° |
High speed |
Option |
A/B/C/D |
EBG-102UB6S |
10kW |
180° |
High speed |
12 x 6 |
A/B |
EBG-102UB4S |
10kW |
180° |
High speed |
12 x 4 |
A/B |
JEBG-102UHO |
10kW |
180° |
High speed |
Option |
A/B |
EBG-203UB6S |
20kW |
270° |
High speed |
12 x 6 |
A/B/C |
EBG-203UB4H |
20kW |
270° |
High speed |
12 x 2
30 x 2 |
B/C/D |
JEBG-203UA0 |
20kW |
270° |
High speed |
Option |
A/B/C/D |
JEBG-163MB |
16kW |
270° |
- |
60 x 1 |
C/D |
JEBG-303UA |
30kW |
270° |
High speed |
Option |
A/B/C/D |
** Applications Legend:
A: Optical thin film
B: Optoelectronic thin film
C: Semiconductor thin film
D: Thick film