This plasma source can be incorporated into a vacuum chamber and generate high-density plasma. The plasma source can be used as Ion Plating (Plasma Assisted Deposition) for thin films, especially optical thin films. Film quality such as density, adhesion, flatness, index of refraction and absorption are improved by comparison with usual vacuum deposition method.
Example of Installation:
Example of Optical Thin Film:
Here you can download an exellent overview on the various applications of the JEOL High-Power Built-in Plasma Gun.
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Download The BS-800 Series/BS-920 Series Electron Beam Sources and Power Supplies Brochure