Simple operation that is integrated with the SEM
Display of EDS spectrum (Live Analysis) and elemental map (Live Map) is possible all the time even during an SEM observation.
The image and movie are examples of the JCM-7000 NeoScope™ table-top scanning electron microscope.
Automatic generation of alloy layer from elemental map
Displaying distribution of elements only to compound.
Visual display is possible with two kinds of phase analysis (Cluster and VCA).
For phase analysis (in red frame), the single click of a button will perform phase separation from the mapping data.
Cluster phase analysis---same compound displayed in the same color
VCA phase analysis---compounds with shade contrast (more/less components are shown)
Basically, it is automated. But manual setting of the number of phases is possible.
Backscattered Electron Composition Image
Cluster phase analysis mode
Never miss an element or specimen change. Record changes with time of EDS by play back analysis.
Example of use 1
Useful for shape/elemental distribution change observations (in-situ observation) by heating/cooling within an SEM.
EDS elemental maps of eraser surface were acquired, made into a movie by play back analysis (140 times speed). The movie has captured how the surface of a sand eraser deformed by an electron beam and how elemental distribution changed accordingly.
Example of use 2
When a specimen deforms during elemental mapping, this function can extract the data before the deformation only and submit it.
Example of use 3
Useful for adjustment / estimation of number of integrations for elemental mapping.
Automatic measurement of number of particles, size, and elemental information in particle analysis.