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Microprobe, Auger, and X-Ray Photoelectron Spectrometer

Electron Probe Microanalyzers (EPMA)

The Electron Probe Microanalyzer (EPMA) allows for high speed, high accuracy qualitative and quantitative in-depth surface analysis as well as area analysis. A non-destructive technique, EPMA utilizes X-ray spectrometry to determines chemical composition of small amounts of solid materials. 

JEOL microprobes have been used in various fields, such as metals, materials and geology in both industry and academia since the 1960s. JEOL commercialized the world's first Field Emission EPMA in 2003.

JEOL EPMA systems have evolved to enhance the user experience with “Easy EPMA” software and integrated EDS analysis.


The Auger Microanalyzer utilizes an analytical technique, named after the French scientist P. Auger. It combines auger electron spectroscopy (AES), ion sputtering and secondary electron imaging, and allows for the determination of 2D and 3D elemental distributions on solid surfaces. JEOL Auger Microprobes offer the highest resolution available.

Photoelectron Spectrometer

Photoelectron Spectrometer systems are capable of qualitative, quantitative, and chemical state analysis for a broad range of samples.



JXA-iHP200F Field Emission EPMA
Ultrahigh imaging and analytical resolution
Research grade microprobe
Field Emission Auger Microprobe

Analytical Optimization

Soft X-ray Emission Spectrometers
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