Rotary Sensor

Rotary Sensors are original products by JEOL. This Rotary Sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate and film thickness in a vacuum depositon process. 6 or 12 crystals are incorporated in the head of the Rotary Sensor. When a crystal failure occurs, the crystal moves automatically and enable continuous evaporation process by using new crystal. The detection hole is in a fixed position, so there is no need to change the value of tooling factor each time a crystal is moved. It is useful for long-time and thick or multi films coating process. We have 2 types of sensor head, 180° (flat) type and 45° type.

(A) Rotary Sensor head		(B) Rotary Sensor (Body)		(C) Electromagnetic valve kit
Spec	Model	Length *	Model	Spec	Model
180° (Flat)	BS-04120SSH	200 mm	BS-04010SSR	5V	BS-04160KIT
		300 mm	BS-04020SSR
		350 mm	BS-04030SSR
		400 mm	BS-04040SSR
		450 mm	BS-04050SSR
		480 mm	BS-04060SSR
45°	BS-04130SSH	500 mm	BS-04070SSR	24V	BS-04170KT
		540 mm	BS-04080SSR
		545 mm	BS-04090SSR
		580 mm	BS-04100SSR
		650 mm	BS-04110SSR

* Length part, including sensor head, is inserted into the vacuum chamber

Select in the form of A + B + C

Rotary Sensor head (180°)	+	Rotary Sensor (200mm)	+	Electromagnetic valve kit (5V)
BS-04120SSH	+	BS-04010SSR	+	BS-04160KIT

As for 12 sensors, please contact us.

Please Note

Not all JEOL Industrial Equipment products are available in every country. For specific information and more details about JEOL products available in your area, contact the IE International Business Office at sales-ieg@jeol.co.jp. Thank you.