Rotary Sensor

Rotary Sensors are original products by JEOL. This Rotary Sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate and film thickness in a vacuum depositon process. 6 or 12 crystals are incorporated in the head of the Rotary Sensor. When a crystal failure occurs, the crystal moves automatically and enable continuous evaporation process by using new crystal. The detection hole is in a fixed position, so there is no need to change the value of tooling factor each time a crystal is moved. It is useful for long-time and thick or multi films coating process. We have 2 types of sensor head, 180° (flat) type and 45° type.

Rotary Sensors


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Select in the form of A + B + C
Rotary Sensor head (180°) + Rotary Sensor (200mm) + Electromagnetic valve kit (5V)
BS-04120SSH BS-04010SSR BS-04160KIT
As for 12 sensors, please contact us.

Please Note: Not all JEOL Industrial Equipment products are available in every country. For specific information and more details about JEOL products available in your area, contact the IE International Business Office at Thank you.

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Download the BS-04 Series Rotary Sensor brochure

Download the BS-04 Series Rotary Sensor brochure

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