Rotary Sensor

Rotary Sensors are original products by JEOL. This Rotary Sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate and film thickness in a vacuum depositon process. 6 or 12 crystals are incorporated in the head of the Rotary Sensor. When a crystal failure occurs, the crystal moves automatically and enable continuous evaporation process by using new crystal. The detection hole is in a fixed position, so there is no need to change the value of tooling factor each time a crystal is moved. It is useful for long-time and thick or multi films coating process. We have 2 types of sensor head, 180° (flat) type and 45° type.

(A) Rotary Sensor head (B) Rotary Sensor (Body) (C) Electromagnetic valve kit
Spec Model Length * Model Spec Model
BS-04120SSH 200 mm BS-04010SSR 5V BS-04160KIT
300 mm BS-04020SSR
350 mm BS-04030SSR
400 mm BS-04040SSR
450 mm BS-04050SSR
480 mm BS-04060SSR
45° BS-04130SSH 500 mm BS-04070SSR 24V BS-04170KT
540 mm BS-04080SSR
545 mm BS-04090SSR
580 mm BS-04100SSR
650 mm BS-04110SSR

* Length part, including sensor head, is inserted into the vacuum chamber

Select in the form of A + B + C

Rotary Sensor head (180°) + Rotary Sensor (200mm) + Electromagnetic valve kit (5V)
BS-04120SSH BS-04010SSR BS-04160KIT

As for 12 sensors, please contact us.

Please Note

Not all JEOL Industrial Equipment products are available in every country. For specific information and more details about JEOL products available in your area, contact the IE International Business Office at Thank you.

Learn More

The BS-04 Series Rotary Sensor Brochure