High Throughput Analytical Electron Microscope


JEM-ACE200F High Throughput Analytical Electron Microscope

The JEM-ACE200F is a fully automated, high performance, high-throughput S/TEM optimally designed to meet the high volume demands of semiconductor device development, yield improvement and FAB manufacturing support. The JEM-ACE200F High Throughput Analytical Electron Microscope delivers fast, stable, and highly-resolved data acquisition for device characterization with high accuracy critical dimension measurements, in addition to atomic resolution imaging and elemental analysis at the sub-nanometer level for defect identification. The JEM-ACE200F can utilize pre-programmed recipes for wholly unattended operation. The JEM-ACE200F has been designed using the industry-standard Cs corrected JEM-ARM200F and the JEM-F200 JEOL instruments, the ACE provides superb stability and resolution even when rapidly switching from TEM to STEM.

Key Features

  • CFEG or Schottky source-second-generation Cs Corrector (ASCOR) optional
  • HAADF/BF STEM and Secondary Electron detectors standard
  • Dual, large-area EDS detectors for high speed chemical analysis
  • AutomationCenter for automated recipe data acquisition system

Application Notes

Request JEM-ACE200F Product Info / Virtual Demo

  • Product / Page of Inquiry: JEM-ACE200F

  • By completing and submitting this form, you agree to the JEOL USA, Inc. Privacy Policy, and that your information may be shared with JEOL USA, Inc. and other JEOL affiliates.

© Copyright 2024 by JEOL USA, Inc.
Terms of Use
Privacy Policy
Cookie Preferences