High Throughput Analytical Electron Microscope

JEM-ACE200F

JEM-ACE200F High Throughput Analytical Electron Microscope

The JEM-ACE200F is a fully automated, high performance, high-throughput S/TEM optimally designed to meet the high volume demands of semiconductor device development, yield improvement and FAB manufacturing support. The JEM-ACE200F High Throughput Analytical Electron Microscope delivers fast, stable, and highly-resolved data acquisition for device characterization with high accuracy critical dimension measurements, in addition to atomic resolution imaging and elemental analysis at the sub-nanometer level for defect identification. The JEM-ACE200F can utilize pre-programmed recipes for wholly unattended operation. The JEM-ACE200F has been designed using the industry-standard Cs corrected JEM-ARM200F and the JEM-F200 JEOL instruments, the ACE provides superb stability and resolution even when rapidly switching from TEM to STEM.

Key Features

  • CFEG or Schottky source-second-generation Cs Corrector (ASCOR) optional
  • HAADF/BF STEM and Secondary Electron detectors standard
  • Dual, large-area EDS detectors for high speed chemical analysis
  • AutomationCenter for automated recipe data acquisition system
 

Application Notes

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