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Yokogushi (Cross-Platform Analysis)
The JEM-ACE200F is a fully automated, high performance, high-throughput S/TEM optimally designed to meet the high volume demands of semiconductor device development, yield improvement and FAB manufacturing support. The JEM-ACE200F High Throughput Analytical Electron Microscope delivers fast, stable, and highly-resolved data acquisition for device characterization with high accuracy critical dimension measurements, in addition to atomic resolution imaging and elemental analysis at the sub-nanometer level for defect identification. The JEM-ACE200F can utilize pre-programmed recipes for wholly unattended operation. The JEM-ACE200F has been designed using the industry-standard Cs corrected JEM-ARM200F and the JEM-F200 JEOL instruments, the ACE provides superb stability and resolution even when rapidly switching from TEM to STEM.
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