Various specimens can be prepared with an easy setting
Standard recipes are provided to prepare 5 kinds of specimens such as a TEM specimen and a cross-sectional specimen.
It can be utilized in various scenes of specimen preparation using FIB.
Fig.1 Specimens that can be prepared using standard recipes. Specimen: Silicon wafer
Multiple specimens can be prepared by automatic processing
The ion beam auto adjustment function enables automatic preparation of multiple specimens over a long period of time.
This realizes unattended specimen preparation overnight.
Fig. 2 shows the result of a continuous TEM specimen preparation for about 8 hours. 10 specimens were prepared, all of them were prepared in the same way, indicating that the automated specimen preparation was stable.
Fig. 2 Example of a long-time continuous TEM specimen preparation (8 hours) Specimen: Silicon wafer
Thin film size:10µm(W) x 7µm(H)
Thin film thickness: 100nm
Reliable TEM specimen preparation of non-flat specimens
With an automatic eucentric adjustment, it is possible to automatically prepare specimens stably, even from materials that have uneven surfaces or different heights.
Fig. 3 shows the thin film specimen prepared by using an uneven surface specimen that has a step of about 70µm. The thin film specimens were made correctly at the upper part and the lower part of the step.
Fig. 3 Example of preparation of TEM specimen with various surface heights(Specimen:TEM specimen grid (Cu) on Si wafer)
Applicable instruments
| Product Name |
Model |
Applicable Instrument |
| Automatic TEM Specimen Preparation System |
IB-07080ATLPS |
JIB-4000PLUS |
| IB-77080ATLPS |
JIB-4700F |