Sample Preparation Equipment Documents


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Documentation in support of your JEOL product.

Argon Beam Cross Sectioning

The new specimen preparation apparatus, the Cross Section Polisher (CP), utilizes a broad argon ion beam that eliminates problems associated with the conventional methods of specimen cross sectioning for SEM. The CP consists of a specimen chamber with a TMP vacuum system, an optical microscope for specimen positioning, and controllers for the vacuum system and a stationary ion beam.

Argon ion slicing (ArIS): a new tool to prepare super large TEM thin films from Earth and planetary materials

TEM foil preparation techniques commonly used in geology, material science and cosmochemistry are argon ion milling, ultramicrotomy and the Focused Ion Beam (FIB) technique. In this study we report on Argon Ion Slicing (ArIS), a new gentle preparation method which enables for the first time to prepare super large continuous and relatively smooth electron-transparent thin films (up to 50,000 µm2) suitable for TEM use. So far Argon Ion Slicing was mainly applied on mono- or bi-mineralic samples in material science. We applied and improved this promising new technique on several geo-materials including two meteorite samples to prove the viability of ArIS on complex (polycrystalline, polyphase, porous) natural samples. The successfully obtained continuous electron-transparent thin films comprise an area of 44,000 µm2 for Murchison (CM 2) and 30,000 µm2 for the Allende (CV 3) meteorite samples, respectively. ArIS is a low-energy broad-ion-beam shadowing technique and benefits from an additional protection device (a copper belt). The sample portion directly beneath the belt is protected from the ion beam. The beam "slices off" the protruding sample parts on both sides of the belt and creates a large elongated wedge. Since the developing thin film is located almost parallel to the beam propagation direction, it is almost unaffected from any irradiation damage and a phase dependent preferred thinning is not observed. Rough sample edges were smoothened with a Cross section polisher prior to ArIS treatment, which turned out to be a crucial step to produce super large electron-transparent thin films.

Artifact-free Cross-sections

The Cross Section Polisher (CP) is a new cross-section sample preparation device that addresses some of the issues involved with preparing very small and relatively soft specimens for SEM analysis. The CP can easily prepare a cross section that is hundreds of micrometers in width and can preserve nanometer-level fine structures.

Carbon Coater (EC-32010CC)

JEOL’s Carbon Coater is a sample preparation device that evaporates carbon to create a conductive thin film on the sample surface. Thin film conductive coatings are effective in eliminating charging with non-conductive materials. Carbon has an advantage over heavy metal coatings (Ex. Gold or Platinum) for X-ray applications (EDS/WDS), CL or backscatter electron imaging due to its inherent low absorption characteristics.

Cross Section Specimen Preparation Device Using Argon Ion Beam for SEM

Scanning Electron Microscopes (SEMs) have been used for various applications, such as research and development and failure analysis. There are many cases where not only observation of a specimen surface – but also observation of a cross section – is important. Preparation of a cross section depends on the specimen structure, observation purpose, and materials. Various preparation methods are put into practice: cutting, mechanical polishing, microtome, and FIB (Focused Ion Beam) are the major methods. In this discussion, we evaluate a new cross section specimen preparation method using an argon ion beam (hereinafter called the Cross-section Polishing or CP method). We have found that this method is extremely useful for observation of layer structures, interfaces, and crystalline structures of metals, ceramics, and composites. Here, we introduce examples of applications to various types of specimens.

Designing Better Batteries Through Innovative Microscopy Characterization

Scanning Electron Microscopes (SEM) support the development of new LIB technologies with morphological observation at the micrometer to nanometer scale, as well as the chemical analysis needed to create high-performance coatings and powders. Ultra-low voltage imaging combined with signal filtering in the SEM allows direct imaging and analysis of battery constituents (anode and cathode) with nanometer resolution. Additionally, one of the important aspects of the analysis is the ability to probe chemistry of the constituents at nm scale (Fig. 1). JEOL FESEM offers the ability to perform microanalysis with energy dispersive spectroscopy (EDS) at extremely low voltages to pinpoint localized makeup of the specimens and, in particular, low atomic number materials such as carbon and fluorine. Moreover, the unique JEOL Soft X-ray spectrometer (SXES) allows researchers to analyze Li.

Direct Scanning Electron Microscopy Imaging of Ferroelectric Domains After Ion Milling

A method for directly observing the ferroelectric domain structure by scanning electron microscopy after argon ion milling has been established. Its advantages are exemplified by exposing the domain structure in three widely used ferroelectric ceramics, BaTiO3, (Na,K)NbO3, and Pb(Ti,Zr)O3. Stable high-resolution images revealing domains with widths <30 nm have been obtained. The domain contrast is caused by electron channeling and is strongly dependent on the sample tilt angle. Owing to a strain- and defect-free surface generated by gentle ion milling, pronounced orientation contrast is observed.

High Quality Cross Sections of Low Melting Point Samples Prepared with Cryo Ion Slicer – Broad Ar Ion Beam Milling Apparatus with a Newly Developed Specimen Cooling Unit

Ion Slicer (IS) is an instrument used to prepare TEM lamellas and SEM cross-sections by employing an Ar broad ion beam. The IS has been getting quite popular in TEM and SEM laboratories because of its ease of use and high quality results. However, it is difficult to mill low melting point materials by the Ar broad ion beam because of thermal damage during the milling. Therefore, we have developed a specimen cooling unit for the IS. This cooling unit keeps specimen at low temperature during the ion milling to avoid the thermal damage. We named this system Cryo Ion Slicer(CIS).

Imaging Texture and Porosity in Mudstones and Shales: Comparison of Secondary and Ion-Milled Backscatter SEM Methods

Observations from a number of unconventional reservoirs lead us to conclude that four major pore types exist in fine-grained reservoir and non-reservoir rocks, that they are effectively connected, and that pore sizes from nanometers to microns must be considered when evaluating size distributions. This paper uses SEM imaging of Haynesville, Horn River, Barnett and Marcellus Shales to illustrate that pore types other than those hosted by organics are present in unconventional shale gas reservoirs, and that they are continuous and connected to kerogen-hosted pores. In addition, we present evidence that the maximum size of pores originating in organic matter is determined by the size of the kerogen mass (in the case of organic particles) or the geometry of enclosing crystals (in the case of amorphous, pore-filling kerogen). Pairs of secondary and ion-milled backscatter SEM images address the misconception that large pores observed in secondary electron images are grain pullouts.

Other Resources

The following resources are available concerning Sample Preparation related instruments:

  • Image Gallery
    -View a selection of Cross Section Polisher images
  • Mixed Media
    -View our series of videos on the use of the Cross Section Polisher