Argon Beam Cross Sectioning
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- 2699 |
- October 20, 2020 |
- Operation of CP, Sample Preparation |
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The new specimen preparation apparatus, the Cross Section Polisher (CP), utilizes a broad argon ion beam that eliminates problems associated with the conventional methods of specimen cross sectioning for SEM. The CP consists of a specimen chamber with a TMP vacuum system, an optical microscope for specimen positioning, and controllers for the vacuum system and a stationary ion beam.