Neo Comfort FE-SEM Acoustic Enclosure

Neo Comfort FE-SEM Acoustic Enclosure

Optimize FE SEM Performance

JEOL's FE-SEM acoustic enclosure enhances imaging performance in room environments that are not ideal. Examples include interference from: noise, airflow changes, magnetic disturbance*, and vibrations*.

* Option

With Neo Comfort

With Neo Comfort

Without Neo Comfort

Without Neo Comfort
Model: JSM-IT810 <SIL>
Landing voltage: 15 kV
WD: 4.5 mm
Signal: Secondary electron
Acoustic noise environment: 90 dB
Specimen: Cu metal interconnects

Key Features

Easy Access to the SEM

Neo Comfort includes a touchscreen panel which displays instrument status and an internal light for easy viewing. Its user-friendly design allows easy access for specimen exchange and maintenance.

One-hand opening and closing of the door

One-hand opening and closing of the door

Mounting 4-inch SiC wafer

Mounting 4-inch SiC wafer

Specifications

Size 1,400 mm (W) × 1,730 mm (D) × 2,250 mm (H)
Weight 1 t / m2 or less (including FE-SEM)
Emergency stop button Included in the standard configuration
Touchscreen Displays the instrument status such as vacuum level
Noise cancelling performance Reduction by 5 dB or more at 140 Hz or higher
Light inside the enclosure Included in the standard configuration
Fixation Possible using anchor bolts
Magnetic field canceller Can be built in*
Flat-type vibration-isolation table Can be built in*
Warning lamp Can be installed*

Request Neo Comfort FE-SEM Acoustic Enclosure Product Info / Virtual Demo

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