Since its introduction, the JEOL ARM series with spherical aberration correction has become the leading atomic resolution microscope used in advanced research.
In response to the increased need for high-resolution imaging of materials containing light elements and of specimens susceptible to electron-beam irradiation, JEOL developed the NEOARM Atomic Resolution Analytical Electron Microscope.
The NEOARM enables atomic-resolution imaging at accelerating voltages ranging from 30 kV to 200 kV. The NEOARM features a unique cold field emission gun (Cold-FEG) as well as a next generation Cs corrector (ASCOR) that compensates for higher order aberrations.
An automated aberration correction system incorporates JEOL’s new aberration correction algorithm for fast and precise aberration correction. This system enables higher-throughput atomic-resolution imaging, even at low accelerating voltages.
Furthermore, a new STEM detector that provides enhanced contrast of light elements is incorporated as a standard unit. Contrast enhancement of light elements is achieved by a new STEM imaging technique, e-ABF: enhanced ABF, facilitating observation of light-element materials.
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Cs corrector "ASCOR" (Advanced STEM Corrector)
The ASCOR incorporated in the NEOARM suppresses the six-fold astigmatism that limits resolution after Cs correction. This combination of ASCOR with a Cold-FEG achieves higher resolution than ever, 0.071nm in HAADF-STEM, with unprecedented resolution at low voltages.
Automated aberration correction software JEOL COSMO™ (Corrector System Module)
JEOL COSMO™ adopts a new aberration correction algorithm SRAM: Segmented Ronchigram Auto-correlation function Matrix. No special sample is required for aberration correction, leading to high-precision and quick correction of higher order aberrations up to 5th order. This system enables fast processing compared to the conventional correction algorithm, and automates this operation, thus eliminating a complicated correction workflow. These features enable higher-throughput atomic-resolution imaging.
New ABF (Annular Bright Field) detector system
The ABF detector is widely used as a technique suitable for high-resolution imaging of light elements. NEOARM supports enhanced contrast of light elements by a newly-designed ABF imaging technique, e-ABF：enhanced ABF. This capability facilitates atomic-level structure observation of materials containing light elements.
Perfect sight detector
The perfect sight detector, integrated into NEOARM, uses hybrid scintillators. This detector enables acquisition of high-contrast and quantitative STEM images over the complete range of accelerating voltage values.
Viewing Camera system
The Viewing Camera system, intended to be used for remote operation, is an image observation system that uses dual cameras. This system allows for remote operation in a room separated from the microscope room and also enables the smart exterior designing of the NEOARM.