LazEdge Laser SEM system

Laser and SEM technologies integrated to enable high-quality, large-area cross-sectioning and measurements

LazEdge Laser SEM system

“LazEdge” is an instrument integrating JEOL’s SEM with the laser technology proprietary of Hamamatsu Photonics K.K., and enables laser processing inside the specimen chamber of the electron microscope. This system enables high-quality cross-section specimens produced through high-speed, large-area processing to be transferred seamlessly to subsequent analyses, such as SEM observation, elemental analysis, and crystal orientation analysis, without exposure to the external environment. As a result, it meets a wide range of analytical needs, including metal specimen analysis, battery analysis requiring air-isolation, and semiconductor failure analysis requiring high-speed cross-sectioning.

Key Features

An SEM with a Femtosecond Laser Capable of High-Quality Cross-Sectioning is Born

1. High-quality cross-sectioning in the specimen chamber

By integrating a laser processing system into the SEM, LazEdge delivers high speed, large area cross sectioning within the specimen chamber. Through the use of a proprietary optical system that enables phase modulation of the laser beam spatially, high quality cross sectioning with reduced LIPSS structures can be achieved.
High-quality cross-sectioning in the specimen chamber

2. 
Contamination prevention in the specimen chamber

The proprietary shielding technology, LazEdge Shield, prevents debris generated during processing from scattering. Detectors, columns, specimen chamber walls can be kept clean without contamination.

3. Seamless operation between laser cross-sectioning and SEM observation

Rapid switching between processing and observation is possible within the SEM specimen chamber. Laser processing alone can provide cross-sections of EBSD quality, and 3D EBSD can be achieved by automatically repeating the processing and measurement steps.
Seamless operation between laser cross-sectioning⇔SEM observation

Quick processing & measuring of large area due to an integrated laser and SEM

Measurement example of a metal specimen using a wide-area and high-speed processing.
It covers a wide area in a short processing time. From large-area processing to EBSD mapping, the entire process is completed in about one hour. It seamlessly handles operations from processing to analysis at an astonishing speed.
Quick processing & measuring of large area due to an integrated laser and SEM

Specimen: Mo plate
Processing time: Approx. 30 minutes

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