The JAMP-9510F Field Emission Auger Microprobe offers the highest spatial resolution available in an Auger microprobe: (min. probe diameter of 3nm SEI; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented "in-lens' Schottky field emission gun, the JAMP-9510F obtains very small spot sizes with beam currents up to 200nA.
The electron spectrometer is an electrostatic hemispherical analyzer (HSA) with a multi-channel detector, and was optimally designed for Auger analysis. It provides user-selectable energy resolution for high throughput high resolution and high sensitivity.
With the JAMP-9510F, high resolution SEM imaging is possible as well as Auger image analysis and line profile analysis. Also, depth profile analysis can be performed during ion etching.
The JAMP-9510F features a high performance ion gun for high speed sputtering and for low energy charge neutralization. User-friendly and easily operated, the JAMP-9510F also offers the flexibility of optional analysis functions such as EDS.