Microprobe, Auger, and X-Ray Photoelectron Spectrometer

Electron Probe Microanalyzers (EPMA)

The Electron Probe Microanalyzer (EPMA) allows for high speed, high accuracy qualitative and quantitative in-depth surface analysis as well as area analysis. A non-destructive technique, EPMA utilizes X-ray spectrometry to determines chemical composition of small amounts of solid materials. 

JEOL microprobes have been used in various fields, such as metals, materials and geology in both industry and academia since the 1960s. JEOL commercialized the world's first Field Emission EPMA in 2003.

JEOL EPMA systems have evolved to enhance the user experience with “Easy EPMA” software and integrated EDS analysis.


The Auger Microanalyzer utilizes an analytical technique, named after the French scientist P. Auger. It combines auger electron spectroscopy (AES), ion sputtering and secondary electron imaging, and allows for the determination of 2D and 3D elemental distributions on solid surfaces. JEOL Auger Microprobes offer the highest resolution available.

Photoelectron Spectrometer

Photoelectron Spectrometer systems are capable of qualitative, quantitative, and chemical state analysis for a broad range of samples.



JXA-iHP200F Field Emission EPMA

Ultrahigh imaging and analytical resolution with a very high and stable probe current for optimum analytical performance

JXA-iSP100 with LaB6 EPMA

Research grade microprobe


Field Emission Auger Microprobe, offers the highest spatial resolution available in an Auger microprobe

Analytical Optimization

Soft X-ray Emission Spectrometer

Utilizes a variable space grating, allowing the efficient and parallel collection of very low energy-rays (so called “soft” X-rays).


Please see our list of applications to meet your scientific needs.
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