JBX-9500FS Electron Beam Lithography System

JBX-9300FSThe JBX-9500FS is an electron beam lithography system featuring a spot beam, Vector scan, and a step and repeat stage. Capable of varying the beam size widely, the system is versatile in its applications from basic research of elements to test production of optical elements to research and development for masks for high accelerating voltage exposure. Its dynamic correction system eliminates defocusing resulting from beam deflection.

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JEOL Electron Beam Lithography

JBX-9500FS Key Product Features

Beam Shape Spot
Accelerating Voltage 100 kV / 50 kV
Gun Emitter ZrO/W (Schottky)
Workpiece Dimension up to 178 mm squaret
Beam Size 4 to 200 nm (100 kV)
7 to 200 nm (50 kV)
Substrate Size 300mm ø

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