The JEOL JSM-7610FPlus Field Emission SEM combines two proven technologies – a semi-in-lens detector with integrated electron energy filter (r-filter) and an in-the-lens Schottky field emission gun – to deliver ultrahigh spatial resolution with a wide range of probe currents for all applications (1pA to more than 200 nA). The JSM-7610FPlus offers true 1,000,000X magnification with 0.8nm resolution at 15kV (1.0nm at 1kV) and unmatched beam stability, making it possible to observe the fine surface morphology of nanostructures.
The JSM-7610FPlus successfully integrates a full set of detectors for secondary electrons, backscattered electrons, EDS, WDS, STEM, EBSD, CL, and more. It is a top-of-the-line SEM for semiconductors, nanotechnology, material science, lithography, and compositional and structural analysis.
IB-09010CP Cross Section Polisher