Photomask / Direct Write Lithography Documents

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Drilled alternating-layer structure for three-dimensional photonic crystals with a full band gap

A new three-dimensional photonic crystal structure is designed to simplify fabrication. A calculation of the band structure predicts that this photonic crystal has a complete photonic band gap in all directions. The entire three-dimensional periodic structure, except for the vertically drilled holes, is formed by automatic shaping during bias sputtering deposition.

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