Photomask / Direct Write Lithography Documents


JEOL Resources

Documentation in support of your JEOL product.

Preparation of Diamond Mold using Electron Beam Lithography for Application to Nanoimprint Lithography

Diamond molds were fabricated by two types of fabrication processes, both of which use a conductive intermediate layer between the diamond surface and polymethylmethacrylate (PMMA) resist to prevent surface charge-up.

Showing 0 Comment

Comments are closed.