JEOL USA Press Releases

JEOL USA Press Releases

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JEOL USA Press Releases

JEOL Aims Direct-Write E-Beam System at Academics

JEOL USA (Peabody, Mass.) today announced a direct-write e-beam lithography system targeted at research labs and universities. The JBX-5500FS system is capable of 10 nm resolution at 50 kV on silicon pieces or wafers up to 100 mm.



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