JXA-8230 SuperProbe Electron Probe Microanalyzer (EPMA)

JXA-8230The JXA-8230, the fifth generation of SuperProbes, is a high resolution, highly stable SEM and a WD/ED Combined Electron Probe Microanalyzer (EPMA) with a new PC-based operating environment for easy data acquisition and analysis.

The combination of up to 5 wavelength dispersive X-ray spectrometers (WDS) and a newly developed energy dispersive X-ray spectrometer (EDS) analyzer featuring spectral imaging assures the most efficient and accurate analysis of data. The WD/ED combined system can simultaneously analyze up to 5 WDS elements and all EDS elements. The backscattered electron image, provided by a highly sensitive solid state detector, the secondary electron image, and optional cathodoluminescence image can all be displayed and viewed at the same time.

The new JXA-8230 WD/ED combined microanalyzer provides for:

  • new large crystal spectrometers for higher detection sensitivity for trace elements and increased count rate without sacrificing energy resolution and P/B ratio
  • new PC automation for easy operation
  • EDS spectral imaging
  • Optional fan free SDD x-ray detectors for high thru-put
  • higher accuracy of quantitative analysis
  • higher resolving power (resolution) for adjacent X-rays
  • higher accuracy of quantitative analysis for light elements

The automated stage can handle samples up to 6” diameter x 2" tall through the airlock, and can reposition a sample to less than 0.5um.

For information about xCLent, a combined X-ray/CL acquisition technique and system to enhance microprobe analysis, see here.

For a bibliography of papers and proceedings published on JEOL EPMA instruments and capabilities, please contact us.