Photomask / Direct Write Lithography Documents

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Phase holograms in polymethyl methacrylate

Complex computer generated phase holograms (CGPHs) have been fabricated in polymethyl methacrylate (PMMA) by partial exposure and subsequent partial development. The CGPH was encoded as a sequence of phase delay pixels and written by e-beam (JEOL JBX-5DII), a different dose being assigned to each value of phase delay.

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