Photomask / Direct Write Lithography Documents


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Documentation in support of your JEOL product.

Phase holograms in polymethyl methacrylate

Complex computer generated phase holograms (CGPHs) have been fabricated in polymethyl methacrylate (PMMA) by partial exposure and subsequent partial development. The CGPH was encoded as a sequence of phase delay pixels and written by e-beam (JEOL JBX-5DII), a different dose being assigned to each value of phase delay.

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