Elemental analysis range
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WDS: (Be) B to U, EDS: B to U
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X-ray spectrometry range
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WDS spectrometry range: 0.087 to 9.3 nm
EDS energy range: 20 keV
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Number of X-ray spectrometers
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WDS: 1 to 5 selectable, EDS: 1
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Maximum specimen size
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100 mm × 100 mm × 50 mm (H)
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Accelerating voltage
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1 to 30 kV (0.1 kV step)
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Probe current stability
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± 0.3%/h
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Secondary electron image resolution
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3 nm at WD 11 mm, 30 kV
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20 nm at 10 kV, 10 nA, WD 11 mm
50 nm at 10 kV, 100 nA, WD 11 mm
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Magnification
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x40 to x300,000 (WD 11mm)
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Scanning image pixel resolution
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Up to 5,120 x 3,840
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