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JEOL Wafer Inspection SEM

JEOL wafer and mask review tools improve yield management with unique capabilities that help rapidly detect minute imperfections and killer defects. 360 degree wafer edge review, high tilt, and fully automated rotation enhance the automatic defect classification capability of our high resolution, high throughput wafer inspection SEMs for 150-300mm wafers. JEOL provides a wide range of SEM based review solutions for the most advanced designs and highest throughputs.

Available Models

WM-7000 Wafer Surface Inspector
WM-10 Wafer Surface Inspector
WM-7 Wafer Surface Inspector