Ultrahigh Resolution Field Emission SEM

JSM-IT800 Series

The JEOL IT800 Ultrahigh Resolution Field Emission SEM is a revolutionary FE-SEM with the most advanced high-resolution analytical technology available today. The JEOL IT800 series offers the next level of analytical intelligence for high spatial resolution imaging and analysis at the nanoscale.

JSM-IT800 Series Ultrahigh Resolution Field Emission SEM


Smart - The IT800 series of Schottky Field Emission SEMs with embedded JEOL Energy Dispersive X-ray (EDS) streamlines operation and workflow efficiency. Elegant functionality, ultrahigh resolution, and powerful software enable seamless acquisition of data from observation to elemental analysis and subsequent reporting.

The JEOL NEOENGINE® electron beam control system and advanced auto functions provide fast transitions between high resolution imaging and high current analyses, without sacrificing performance, resulting in unprecedented ease of use. Advanced AI algorithms optimize control of electron lenses in real time, correct electron trajectories and automatically align the beam, all while correcting focus, brightness/contrast, and astigmatism. Live EDS analysis allows direct monitoring of specimen chemical composition during imaging.

The JEOL SEM seamlessly integrates optical imaging and navigation, SEM imaging, and EDS Live Analysis with one-click operation.

Flexible - The JSM-IT800 series is equipped with a large specimen chamber that accommodates a wide variety of detectors simultaneously, including: multiple EDS, WDS, STEM, BSE, and CL. JEOL’s unique Soft X-ray Emission Spectrometer allows efficient and parallel collection of very low-energy X-rays while providing unprecedented chemical state analysis.

Powerful - The IT800SHL is JEOL’s flagship FE SEM with up to 2,000,000X magnification and an accelerating voltage range of 0.01 to 30kV, making it possible to acquire stunning details of nanostructures and comprehensive analysis. This highly versatile, easy-to-use field emission SEM offers the next level of analytical intelligence in FE-SEM.

High Spatial Resolution

The JSM-IT800 utilizes a hybrid objective lens that combines electromagnetic and electrostatic lenses with through-the-lens electron detection system. With no electromagnetic leakage below the lens it is ideal for imaging magnetic materials and analyzing samples with EBSD. The integration of in-the-lens acceleration and deceleration of the electron beam results in minimization of the effects of lens aberrations at low kV, yielding higher resolution at the lowest accelerating voltages.

Unique to the SHL version, the new Upper Hybrid Detector (UHD) provides excellent S/N and detection efficiency of electrons emitted by the specimen, without specimen bias.

The JSM-IT800 employs a beam deceleration mode (BD mode) to decrease charging during imaging of nonconductive specimens, improve resolution at low kV and enhance surface topography by allowing accelerating voltages as low as 0.01kV.

The combination of the JEOL’s unique in lens field emission gun which allows for up to 500nA of beam current deliverable to the sample and the aperture angle control lens (ACL) which optimizes large probe currents into the smallest probe diameter, makes this microscope ideally suited for both imaging and analysis of nanostructures.

New BSE Detectors for Increased Sensitivity

In addition to solid state BSE detectors (BED), a scintillator (SBED) and versatile multi-segmented (VBED) detectors are also available to increase response, sensitivity and signal selection from different detection angles and construct 3D images of the sample.

Key Features

  • Versatile electromagnetic/electrostatic hybrid lens design for outstanding imaging and analysis performance
  • NEOENGINE – intelligent automated electron beam control
  • Advanced auto functions including beam alignment, focus, and stigmation
  • In-lens field emission gun
  • Aperture Angle Control Lens (ACL) for superb resolution at any kV or probe current
  • Beam Deceleration (BD) mode reduces effects of lens aberrations at the sample
  • Large specimen chamber with multiple ports
  • Montage images and elemental maps
  • Smile View Lab for data management and report generation
  • Live Analysis with integrated JEOL EDS elemental screening
  • High spatial resolution imaging and analysis of nanostructures

Application Notes

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