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Documents of interest in support of your JEOL product

Choose the Right SEM − Analysis Edition

The holy grail of nanoscale analysis with EDS is to quickly analyze any features which can be imaged in the SEM. However, for nanoscale features this is complicated by that fact that X-ray spatial resolution is typically larger than SEM imaging resolution. Figure 1 shows EDS maps from an integrated circuit cross section at 15kV and 6kV using a W SEM and an FE SEM, as well as the approximate X-ray signal depths at those voltages.

SEM - 3D Surface Reconstruction

SEM is an indispensable tool for studying the microstructure of a wide variety of materials. The images generated are inherently a 2 dimensional representation of the sample surface. Unlocking the 3rd dimension by reconstructing a 3D model from multiple SEM images can enhance our understanding of complex microstructure. This 3D view is often more intuitive and surface metrology characteristics can be calculated.

STEM-in-SEM – Analysis of Biological Specimens

STEM-in-SEM (Scanning Transmission Electron Microscopy in an SEM) has become a popular technique for biologists, polymer scientists and materials scientists for its ease of use, cost effectiveness and high resolution. It is especially suited to investigating the internal structure of thin film (100-200nm) samples as well as size and shape of submicron to nanometer particles. With standard SEM imaging modes on bulk samples, there are limitations in the ultimate resolution that can be achieved due in part by the beam-sample interactions. With STEM-in-SEM, the sample is very thin and the interaction volume is small. Therefore, the resolution more closely approximates the diameter of the electron beam at the exit surface of the sample allowing for high resolution; using STEM with our state of the art FE SEMs, sub-nanometer resolution is easily achieved.

Other Resources

The following resources are available concerning Electron Optic related instruments:

  • Image Gallery
    -View a selection of electron images
  • FAQs
    -See answers from questions often asked about our SEM and Surface Analysis instruments
  • Links & Resources
    -View our page of useful and interesting links to various electron microscopy resources
  • Videos
    -View some product presentations of our instruments
  • SEM Theory and SEM Training

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