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Documents of interest in support of your JEOL product

Choose the Right SEM − Analysis Edition

The holy grail of nanoscale analysis with EDS is to quickly analyze any features which can be imaged in the SEM. However, for nanoscale features this is complicated by that fact that X-ray spatial resolution is typically larger than SEM imaging resolution. Figure 1 shows EDS maps from an integrated circuit cross section at 15kV and 6kV using a W SEM and an FE SEM, as well as the approximate X-ray signal depths at those voltages.

Large Direct Access Chamber SEMs

JEOL’s large chamber SEMs are designed for easy access in both the Tungsten SEM and Thermal Schottky Field Emission SEM models. Our large, direct-access sample chambers are ideal suited for the labs that require high-throughput and multi-sample imaging and analysis, multiple ports to fit a variety of accessories, and analysis of large samples that cannot be cut to size.

SEM - 3D Surface Reconstruction

SEM is an indispensable tool for studying the microstructure of a wide variety of materials. The images generated are inherently a 2 dimensional representation of the sample surface. Unlocking the 3rd dimension by reconstructing a 3D model from multiple SEM images can enhance our understanding of complex microstructure. This 3D view is often more intuitive and surface metrology characteristics can be calculated.

Other Resources

The following resources are available concerning Electron Optic related instruments:

  • Image Gallery
    -View a selection of electron images
  • FAQs
    -See answers from questions often asked about our SEM and Surface Analysis instruments
  • Links & Resources
    -View our page of useful and interesting links to various electron microscopy resources
  • Videos
    -View some product presentations of our instruments
  • SEM Theory and SEM Training

Request Technical Documents for JEOL EPMA (Microprobes)

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  • Technical Documentation for JEOL EPMA (Microprobes)