Electron Optic Documents

SEM manufacturers can choose different output sizes for their images, making magnification a very deceptive number when comparing SEM micrographs from different SEM manufacturers. Because of this fact, the best way to compare images is to compare the length of the micron bar or field of view.

There are a number of applications where scientists and engineers are faced with air or moisture sensitive samples that require imaging and analysis using a scanning electron microscope (SEM). Applications include: components in rechargeable batteries, fuel cells, and catalysts among others. Any exposure to oxygen or moisture in the air can completely alter or destroy the structure of these highly reactive materials. JEOL has built a special air-lock system that can handle the transfer of air-sensitive specimens to be imaged in the SEM without atmospheric exposure.

Scanning electron microscopes (SEM) coupled with an energy dispersive X-ray detector (EDS) are used extensively to provide insight into a sample’s chemical makeup. This SEM-EDS technique can provide information on the elements present, their relative concentrations and spatial distribution over very small volumes (micron and some instances nanometer scale).

The holy grail of nanoscale analysis with EDS is to quickly analyze any features which can be imaged in the SEM. However, for nanoscale features this is complicated by that fact that X-ray spatial resolution is typically larger than SEM imaging resolution. Figure 1 shows EDS maps from an integrated circuit cross section at 15kV and 6kV using a W SEM and an FE SEM, as well as the approximate X-ray signal depths at those voltages.

The JSM-IT200LA SEM delivers the ultimate user experience for high through- put imaging and elemental analysis. An embedded color camera simplifies specimen navigation, advanced automation delivers crisp secondary and backscatter images in seconds, and Real-Time (Live) EDS provides instant feedback of the specimen composition for intuitive operation at any experi- ence level. This All-in-One SEM also includes high and low vacuum modes for observation of a wide range of specimen types without compromise. All of this is delivered at a great value.

Utilizing Monte Carlo Modeling of electron trajectories Electron Flight Simulator is a software tool designed to make your job easier. It can help you understand difficult samples, show the best way to run an analysis, and help explain results to others. With it you can see how the electron beam penetrates your sample, and where the X-ray signal comes from, for a wide variety of microscope conditions. You can model multiple layers, particles, defects, inclusions, and cross-sections. Any sample chemistry can be modeled.

JEOL SEMs are delivered with the capability for remote viewing and remote operation. The SEM computer includes a 2nd ethernet card for connection to your local area network. There is no need for a second support computer. Just connect your JEOL SEM computer to a reliable and fast broadband internet connection and choose the software platform that meets your remote access requirements.

JEOL’s large chamber SEMs are designed for easy access in both the Tungsten SEM and Thermal Schottky Field Emission SEM models. Our large, direct-access sample chambers are ideal suited for the labs that require high-throughput and multi-sample imaging and analysis, multiple ports to fit a variety of accessories, and analysis of large samples that cannot be cut to size.

Our new generation of low vacuum secondary electron detector (LVSED) provides enhanced performance at fast scan speeds and even greater collection efficiency. Why choose LVSED imaging over backscattered electron (BSE)? Considering electron-beam sample interaction, SE imaging can provide better overall spatial resolution as well as the ability to observe fine topographic detail when compared to BSE imaging. This is especially true when imaging low Z materials where interaction volumes can be high with BSE imaging.

Wet specimens are notoriously difficult to image in scanning electron microscopes (SEM) owing to evaporation from the required vacuum of the specimen chamber. Traditionally, this issue has been addressed by increasing the specimen chamber pressure. Unfortunately, observation under high specimen chamber pressure cannot prevent the initial evaporation effects. The wet cover method, where the original surface water is retained (and, therefore, considered wet), provides a way to introduce and subsequently image specimens that are sensitive to evaporation within a SEM, while preventing evaporation-related damage, and to observe interesting specimen–water interactions.

rss

Other Resources

  • Image Gallery
    View a selection of electron images
  • FAQs
    See answers from questions often asked about our SEM and Surface Analysis instruments
  • Links & Resources
    View our page of useful and interesting links to various electron microscopy resources
  • Videos
    View some product presentations of our instruments
    • JEOL USA, Inc.
      11 Dearborn Road
      Peabody, MA 01960
      © Copyright 2022 by JEOL USA, Inc.
      Terms of Use
      |
      Privacy Policy
      |
      Cookie Preferences