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New Methods for Cross-Section Sample Preparation Using Broad Argon Ion Beam (Paper Analysis)

In 2006, we introduced a new specimen preparation apparatus, Cross-section Polisher (CP), which employs a broad argon ion beam to prepare cross-sections of specimens [1-2]. The principle of the CP is simple: a region of the specimen that is not covered by the masking plate is milled by an argon broad ion beam, as shown in Fig.1. The specimens with irregular shapes and rough surfaces that cannot be embedded prior to ion milling require additional care and consideration prior to ion-milling with CP.

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