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JSM-7800F PRIME Extreme-resolution Analytical Field Emission SEM

For any type of sample, any type of analysis

Carbon Nanotube with Catalyst

Magnetic Domains

EBSD analysis of Polysilicon

Penium Margaritaceum (Unicellular Green Alga) - A. Andreas, Skidmore College



Industry-leading FE-SEM for any type of sample, any type of analysis

Industry-leading FE-SEM for any type of sample, any type of analysis

The JSM-7800F PRIME represents a significant leap forward in Field Emission SEM technology, with unmatched resolution and stability for imaging and analysis. JEOL's highest performance FE-SEM makes it possible to:

  • Observe the finest structural morphology of nanomaterials at 1,000,000X magnification with a 7Å resolution at 1kV
  • Collect large area EBSD maps at low magnifications without distortion
  • Perform low kV imaging and analysis of highly magnetic samples.
  • Image thin, electron transparent samples with sub 7Å in STEM-in-SEM mode.
Optimized for extreme imaging and analysis

The JSM-7800F PRIME uniquely combines an in-lens field emission gun with an aperture angle control lens (ACL), optimizing large probe currents (up to 200 nA) for operation at the smallest probe diameter. The new super hybrid lens design allows high resolution imaging of any type of specimen. The SEM excels at low accelerating voltage X-ray spectroscopy and cathodoluminescence, combining large beam currents with a small interaction volume and dramatically increasing analytical resolution to the sub 100nm scale. Beam deceleration in GB Mode provides charge balance and extreme high resolution imaging of surfaces and nonconductive samples by effectively reducing effects of lens aberrations.

Ultimate versatility

The JSM-7800F PRIME is suitable for a wide variety of applications, from cryo-microscopy to electron beam lithography. It accommodates multiple analytical attachments, including EDS, WDS, STEM, BSE, CL, EBIC, and an IR camera and stage navigation camera. The SEM comes with a choice of three stage sizes and three specimen exchange airlock sizes. It can also be equipped with tensile, heating, and cooling stages for in situ experiments.

The system can be configured for low vacuum operation for imaging non-conductive samples.

JSM-7800F PRIME Details

  • Ultra-low kV imaging down to 10V
  • Through-the-lens detector with energy filter for SE/BSE collection
  • Aberration Correction Lens (ACL) for superb resolution at any kV or probe current
  • Gentle Beam (GBSH) Mode reduces effects of lens aberrations at the sample (stage bias)
  • Large specimen chamber with multiple ports
  • Easy to use intuitive user interface
  • Unique backscatter detector allows image acquisition even at very low kVs with high resolution

LV capability supports operation at low chamber vacuum (from 10 to 300 Pa) for the purpose of imaging and microanalysis of non-conductive samples. The LV configuration includes a retractable solid state backscattered electron detector. Via software control, both backscatter detector and LV orifice can be retracted without breaking chamber vacuum. This is a JEOL exclusive feature that guarantees unrestricted low magnification imaging and the ability to deliver maximum beam currents in HV operation. The system comes with an automatic pressure controller with motorized leak valve and uses dry nitrogen.

Low vacuum mode pressure 10 Pa ~ 300 Pa
Resolution in Low Vacuum mode Backscattered electron image: 1.5 nm (30 Pa, 30 kV)
Secondary electron image: 1.8 nm (60 Pa, 30 kV)
Maximum probe current
In high vacuum mode: 200 nA
In low vacuum mode: 20 nA
Orifice and BSE detector
LV BEI standard, LV SED option
Retractable in vacuum