June 15, 2017, Peabody, Mass. -- The JEOL InfiTOF compact high-resolution gas analysis mass spectrometer is ideal for monitoring trace impurities in semiconductor process gases, evolved gases from catalytic reactions, vapor epitaxy and more. No larger than a desktop PC, the InfiTOF instantly separates isobaric gases such CO and N2, or N2O and CO2, for continuous monitoring without chromatography.
This Time-of-Flight Mass Spectrometer uses Multi-turn and Perfect focusing technologies to achieve high mass-resolving power in a very compact package.
Designed for real time monitoring of directly introduced gas, this high mass-resolution mass spectrometer features stability for real time gas monitoring and elemental composition determination through accurate mass measurement.
On July 11-13, the InfiTOF will be on display at Semicon West in San Francisco, CA, where its applications to the analysis of gases used in semiconductor processing and vapor epitaxy and real-time monitoring of gases relevant to catalytic processes, battery technology and advanced materials will be highlighted.