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High Quality Cross Sections of Low Melting Point Samples Prepared with Cryo Ion Slicer – Broad Ar Ion Beam Milling Apparatus with a Newly Developed Specimen Cooling Unit

Ion Slicer (IS) is an instrument used to prepare TEM lamellas and SEM cross-sections by employing an Ar broad ion beam. The IS has been getting quite popular in TEM and SEM laboratories because of its ease of use and high quality results. However, it is difficult to mill low melting point materials by the Ar broad ion beam because of thermal damage during the milling. Therefore, we have developed a specimen cooling unit for the IS. This cooling unit keeps specimen at low temperature during the ion milling to avoid the thermal damage. We named this system Cryo Ion Slicer(CIS).

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