JEOL USA JSM-7600F Scanning Electron Microscope

Saturday, February 04, 2012
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PRODUCTS : Electron Optics : Scanning Electron Microscopes (SEM) : Semi-in-Lens FE : JSM-7600F

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Scanning Electron Microscopes (SEM)

Transmission Electron Microscopes (TEM)

Surface Analysis (SA)

Application Images

CL image: quartz and zinc oxide.
In situ observation of dynamic thermal changes using Protochips Aduro™ heating stage.
Electron beam-induced deposition (EBID) using OmniGIS™ gas injection system.
Nano-Au grain imaged at 0.5 kV with the LABe detector. The sample was prepared using JEOL Cross Section Polisher.
FE SEM STEM image of faujasite with 7.4 angstrom spacing at 1,000,000X magnification.

Spotlight

SEM Views Surfaces of Renewable Energy Products
Characterizing Nanometer-scale Materials Using a Low Angle Backscatter Detector (LABe)
Download Technical Note from AM&P Magazine: Multispectral Imaging in an FEG-SEM

Thermal, Analytical FE SEM

The JEOL JSM-7600F FEG-SEM combines two proven technologies – an electron column with semi-in-lens detectors and an in-the-lens Schottky field emission gun – to deliver ultrahigh resolution with wide range of probe currents for all applications (1pA to more than 200 nA). The JSM-7600F offers true 1,000,000X magnification with 1nm resolution and unmatched stability, making it possible to observe the fine surface morphology of nanostructures.

The JSM-7600F successfully integrates a full set of detectors for secondary electrons, backscattered electrons, EDS, WDS, EBSD, CL, and more. It is a top-of-the-line SEM for nanotechnology, material science, biology, cryo-microscopy, lithography, and compositional and structural analysis. The large specimen chamber accommodates a 200 mm diameter sample.

JSM-7600F Details

Key Features
Specifications
Resources

Ultrahigh resolution comparable to the cold cathode FE-SEM.
In-Lens Thermal FEG.
Aperture angle control lens automatically optimizes the spot size at both high and low currents for both analysis and imaging.
High probe current up to 200 nA (at 15 kV) for various analytical purposes (WDS, EDS, EBSD, CL, etc.).
Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images.
Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression.
Eco design for energy conservation.
Large specimen chamber (200mm diameter sample).
Ultraclean vacuum.

Resolution
(secondary electron image)

1.0 nm (15 kV)
1.5 nm (1 kV) in GB mode
0.6 nm (30 kV) attainable in STEM

Magnification

25 to 1,000,000x (printed as a 120mm x 90mm micrograph)

Accelerating voltage

0.1 to 30 kV

Beam current

1 pA to > 200 nA at 15 kV

Aperture angle control lens

Integrated

Detector

Upper and lower detectors
SEI, retractable LABe (BEI)

Energy Filter

In column r-filter for upper SE detector

Gentle beam

Integrated beam deceleration

Digital images

1,280 x 960, 2,560 x 1,920, 5,120 x 3,840

Specimen exchange chamber

Single step loading/unloading

Specimen stage

Eucentric, 5 axis motor drive

Type	IA	II	III
X-Y	70 mm x 50 mm	110 mm x 80 mm	140 mm x 80 mm
Tilt	-5 to +70°	-5 to +70°	-5 to +70°
Rotation	360°	360°	360°
Z	1.5 mm to 40 mm	1.5 mm to 40 mm	1.5 mm to 25 mm

Vacuum system

2 SIPs, magnetic bearing TMP, RP

Energy efficient design

Normal operation: 1.2 kVA
Sleep mode: 1 kVA
Operation system OFF: 0.76 kVA

Download the JSM-7600F brochure.

Environmental Holders and Airlock Systems.

Gas-Assisted E-Beam Lithography.

Aperture Angle Control Lens.