High Throughput, Automated TEM, S/TEM, SEM and Analysis
The JEM-2800 is a high throughput nano-analysis TEM with automated functions, making it ideal for process and quality control of mass produced semiconductor and materials samples.
This versatile TEM features high resolution imaging in TEM, STEM, and SE modes; ultrasensitive elemental mapping with a large angle Energy Dispersive Spectrometer (EDS); Electron Energy Loss Spectroscopy (EELS) for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples.
An all-new design, the JEM-2800 functions without the use of fluorescent screen. It can be operated in a bright room and is clean room compliant.