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JSM-7610F Scanning Electron Microscope

Thermal, Analytical FE SEM

Application Images
CL image: quartz and zinc oxide.
Application Images
In situ observation of dynamic thermal changes using Protochips Aduro™ heating stage.
Application Images
Electron beam-induced deposition (EBID) using OmniGIS™ gas injection system.
Application Images
Nano-Au grain imaged at 0.5 kV with the LABe detector. The sample was prepared using JEOL Cross Section Polisher.
Application Images
FE SEM STEM image of faujasite with 7.4 angstrom spacing at 1,000,000X magnification.

Thermal, Analytical FE SEM

The JEOL JSM-7610F FEG-SEM combines two proven technologies – an electron column with semi-in-lens detectors and an in-the-lens Schottky field emission gun – to deliver ultrahigh resolution with wide range of probe currents for all applications (1pA to more than 200 nA). The JSM-7600F offers true 1,000,000X magnification with 1nm resolution and unmatched stability, making it possible to observe the fine surface morphology of nanostructures.

The JSM-7610F successfully integrates a full set of detectors for secondary electrons, backscattered electrons, EDS, WDS, EBSD, CL, and more. It is a top-of-the-line SEM for nanotechnology, material science, biology, cryo-microscopy, lithography, and compositional and structural analysis. The large specimen chamber accommodates a 200 mm diameter sample.

JSM-7610F Details

  • Ultrahigh resolution.
  • In-Lens Thermal FEG.
  • Aperture angle control lens automatically optimizes the spot size at both high and low currents for both analysis and imaging.
  • High probe current up to 200 nA (at 15 kV) for various analytical purposes (WDS, EDS, EBSD, CL, etc.).
  • Built-in r-filter enabling user selectable mixture of secondary electron and backscattered electron images.
  • Gentle Beam mode for top-surface imaging, reduced beam damage and charge suppression.
  • Eco design for energy conservation.
  • Large specimen chamber (200mm diameter sample).
  • Ultraclean vacuum.
(secondary electron image)
1.0 nm (15 kV)
1.3 nm (1 kV) in GB mode
0.8 nm (30 kV) attainable in STEM
Magnification 25 to 1,000,000x (printed as a 120mm x 90mm micrograph)
Accelerating voltage 0.1 to 30 kV
Beam current 1 pA to > 200 nA at 15 kV
Aperture angle control lens Integrated
Detector Upper and lower detectors
SEI, retractable LABe (BEI)
Energy Filter In column r-filter for upper SE detector
Gentle beam Integrated beam deceleration
Digital images 1,280 x 960, 2,560 x 1,920, 5,120 x 3,840
Specimen exchange chamber Single step loading/unloading
Specimen stage Eucentric, 5 axis motor drive
X-Y 70 mm x 50 mm 110 mm x 80 mm 140 mm x 80 mm
Tilt -5 to +70° -5 to +70° -5 to +70°
Rotation 360° 360° 360°
Z 1.5 mm to 40 mm 1.5 mm to 40 mm 1.5 mm to 25 mm
Vacuum system 2 SIPs, magnetic bearing TMP, RP
Energy efficient design Normal operation: 1.2 kVA
Sleep mode: 1 kVA
Operation system OFF: 0.76 kVA