Qualitative and Comparative Analyses of Impurities in Isopropanol using Two Different GC Columns
General
Isopropanol (IPA), for its superior solubility and volatility, is playing an indispensable role as a cleaning agent or solvent in the semiconductor industry. Quality control of high purity IPA products directly determines the stability of fabrication processes and the performance of resulting devices, making it necessary to detect and identify trace impurities contained. Because varying impurity compositions among IPA products, which are produced and refined differently, are likely to affect microstructure formation in semiconductor fabrication processes, comparative analysis of different compositions is in increasing demand.
In this work, we conducted a comprehensive analysis of impurities contained in two different commercial IPA products, using a JMS-T2000GC, one of JEOL’s gas chromatography-high resolution mass spectrometers (GC-HRMS). We also used two different GC columns to identify impurity components to examine polarities and diverse molecular structures of the compounds.
Our objective is to prove the effectiveness of the JMS-T2000GC combined with its qualitative analysis software, msFineAnalysis AI, in qualitative analysis of trace organic impurities contained in different IPA samples, so that we can contribute to enhancing the performance level of solvent quality control in semiconductor fabrication.