Electron Optic Documents

JEOL’s large chamber SEMs are designed for easy access in both the Tungsten SEM and Thermal Schottky Field Emission SEM models. Our large, direct-access sample chambers are ideal suited for the labs that require high-throughput and multi-sample imaging and analysis, multiple ports to fit a variety of accessories, and analysis of large samples that cannot be cut to size.

The applications for lithium ion batteries (LIB) cover a wide range, from power sources for personal computers and mobile devices to automobiles, and there is always a demand for even better performance and safety. In order to ensure the performance and quality of LIB, analysis and evaluation using high-performance assessment systems is necessary. JEOL offers a full line-up of equipment to support the development of new LIB technologies and to improve product quality, including instruments for morphology observation and surface analysis, chemical analysis systems to perform structural analysis on a molecular level, as well as fabrication systems to create high-performance coatings and powders. This LIB note offers solutions for researchers and engineers who are looking for the best equipment for their application.

Our new generation of low vacuum secondary electron detector (LVSED) provides enhanced performance at fast scan speeds and even greater collection efficiency. Why choose LVSED imaging over backscattered electron (BSE)? Considering electron-beam sample interaction, SE imaging can provide better overall spatial resolution as well as the ability to observe fine topographic detail when compared to BSE imaging. This is especially true when imaging low Z materials where interaction volumes can be high with BSE imaging.

The SHL is a newly designed objective lens for high-resolution observation at low accelerating voltages. Unlike the semi-in lens SEM, with a large electromagnetic field below the lens, which was widely used for high-resolution, low kV observation, the SHL achieves high resolution by superimposing a magnetic field onto the electrostatic field to suppress magnetic field leakage. Therefore, the SHL is suitable for the high resolution observation of magnetic materials and electron backscattered diffraction (EBSD) even at short WD, which were difficult with the semi-in lens type SEMs. The SHL type SEM can also be configured for low vacuum operation while the semi-in lens type cannot.

STEM-in-SEM (Scanning Transmission Electron Microscopy in an SEM) has become a popular technique for biologists, polymer scientists and materials scientists for its ease of use, cost effectiveness and high resolution. It is especially suited to investigation of the internal structure of thin film (50-100nm) samples as well as size and shape of submicron to nanometer particles. With standard SEM imaging modes and EDS analysis on bulk samples, there are limitations in the ultimate resolution that can be achieved due in part to the beam-sample interactions. With STEM-in-SEM, the sample is very thin and the interaction volume is greatly reduced, which allows for sub-nanometer resolution and nanoscale analysis. One of the main challenges to EDS analysis using STEM-in-SEM is how to reduce the hard X-ray contribution from the detector and chamber (generally peaks from Al and Si). JEOL has designed a dedicated Analytical holder with a carbon retainer that greatly reduces these spurious peaks allowing for more accurate analytical data.

The ability to increase the probe current for fast microanalysis, while still maintaining a small spot size and small volume of excitation for high resolution, has been the holy grail of microanalysis in SEM. One of the unique features of JEOL’s FE SEMs is the patented Aperture Angle Control Lens (ACL). This lens automatically optimizes for both high resolution imaging at low probe currents and high spatial resolution X-ray analysis at high probe currents with a seamless transition between the two. This is essential for rapid analysis and superb image quality and is particularly true for low kV microanalysis. The ACL works by considering effects of all aberrations (spherical, chromatic and diffraction limitations) on spot size and automatically optimizing the convergence angle.

Wet specimens are notoriously difficult to image in scanning electron microscopes (SEM) owing to evaporation from the required vacuum of the specimen chamber. Traditionally, this issue has been addressed by increasing the specimen chamber pressure. Unfortunately, observation under high specimen chamber pressure cannot prevent the initial evaporation effects. The wet cover method, where the original surface water is retained (and, therefore, considered wet), provides a way to introduce and subsequently image specimens that are sensitive to evaporation within a SEM, while preventing evaporation-related damage, and to observe interesting specimen–water interactions.

JEOL’s Particle Analysis Software 3 (PA3) enhances the capability of your analytical SEM by automating the detection, EDS analysis and classification of particles, grains or other features in your samples. Fully integrated with our SEM-EDS systems, PA3 increases throughput and productivity by providing fast, unattended measurements across large areas of a sample, or multiple samples.

Phase Analysis provides a new level of automation to your JEOL EDS data analysis and interpretation workflows

When a sample is exposed to the electron beam in a scanning electron microscope a variety of signals are generated. X-rays being one of those signals that can provide valuable insight into a materials chemical makeup. The collected X-ray signal includes background X-ray radiation and more importantly, X-rays of specific energies, that are characteristic of the elements present in the sample. For this reason, an energy dispersive X-ray detector (EDS) is one of the most common detectors that is added to a scanning electron microscope (SEM). It is used to not only determine the elements present in a sample but in many instances can give insight to the quantity as well as the spatial distribution of these elements over very small volumes.