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Symmetry evaluation of vacancy structure in silicon single crystal
Symmetry evaluation of vacancy structure in silicon single crystal
Application Note ER260005

Information obtained from ESR measurements

  • Confirmation of the presence of defects
  • Evaluation of defect symmetry
  • Analysis of defect orientation
  • Evaluation of the electronic states of defects

Example of Measurements on a Silicon Single Crystal

We present an example of defect structure evaluation based on the angular dependence of ESR signals. In silicon crystals, the resonance magnetic field and the g-value of an ESR signal vary with the orientation of the external magnetic field relative to the crystal axes ([100], [110], [111], etc.). Analysis of this angular dependence provides valuable information about the symmetry and electronic structure of vacancy-related defects.

 

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