Electron Optic Documents

Imaging of nanostructured materials requires a new design of SEM that provides ultimate resolution for both imaging and microanalysis, combined with the ability to image any type of material. An innovative new SEM column design from JEOL Ltd. utilizes a hybrid lens (combination electrostatic and electromagnetic lenses) in conjunction with a Through-The-Lens (TTL) detection system to provide the user with ultimate imaging and analytical performance. The hybrid electrostatic/electromagnetic lens minimizes magnetic field effects at the sample and is relatively impervious to stray magnetic fields. The lens is characterized by low values for the spherical and chromatic aberration coefficients. Moreover, the proven Aberration Correction Lens (ACL) technology automatically maintains small probe size for both imaging and microanalysis.

SEM offers a unique ability to visualize specimen surface morphology (via secondary electron imaging), as well as obtain crystallographic or Z-contrast information (via backscatter electron imaging) while at the same time performing chemical composition analysis via energy dispersive spectroscopy (EDS). In the past, this simultaneous acquisition was often hindered by deficiencies in detector and column design, that would not allow sufficient count rates or sufficient resolution for adequate analysis at various working distances.